Modelling methodology of MEMS structures based on Cosserat theory
Other Computer Science
2008-12-18 v1
Abstract
Modelling MEMS involves a variety of software tools that deal with the analysis of complex geometrical structures and the assessment of various interactions among different energy domains and components. Moreover, the MEMS market is growing very fast, but surprisingly, there is a paucity of modelling and simulation methodology for precise performance verification of MEMS products in the nonlinear regime. For that reason, an efficient and rapid modelling approach is proposed that meets the linear and nonlinear dynamic behaviour of MEMS systems.
Cite
@article{arxiv.0805.0931,
title = {Modelling methodology of MEMS structures based on Cosserat theory},
author = {Mustafa Calis and Omar Laghrouche and Marc Desmulliez},
journal= {arXiv preprint arXiv:0805.0931},
year = {2008}
}
Comments
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838)