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Related papers: Integrating MEMS and ICs

200 papers

Microelectromechanical system (MEMS) based on-chip resonators offer great potential for sensing and high frequency signal processing applications due to their exceptional features like small size, large frequency-quality factor product,…

Other Computer Science · Computer Science 2012-02-15 Ritesh Ray Chaudhuri , Joydeep Basu , Tarun Kanti Bhattacharyya

Modern electronic systems become evermore complex, yet remain modular, with integrated circuits (ICs) acting as versatile hardware components at their heart. Electronic design automation (EDA) for ICs has focused traditionally on power,…

The rapid incursion of new technologies such as MEMS and smart sensor device manufacturing requires new tailor-made packaging designs. In many applications these devices are exposed to humid environments. Since the penetration of moisture…

Other Computer Science · Computer Science 2008-12-18 Andras Vass-Varnai , M. Rencz

Bacteria sense a diverse range of environmental analytes with high sensitivity and temporal resolution. Engineering and synthetic biology approaches enabled harnessing this capability through development of whole-cell biosensors that…

The progressive installation of renewable energy sources requires the coordination of energy consuming devices. At consumer level, this coordination can be done by a home energy management system (HEMS). Interoperability issues need to be…

Other Computer Science · Computer Science 2014-06-13 Dominik Egarter , Andrea Monacchi , Tamer Khatib , Wilfried Elmenreich

Nanoelectromechanical systems, or NEMS, are MEMS scaled to submicron dimensions. In this size regime, it is possible to attain extremely high fundamental frequencies while simultaneously preserving very high mechanical responsivity (small…

Mesoscale and Nanoscale Physics · Physics 2007-05-23 M. L. Roukes

Various chips for the silicon sensors measurements are described. These chips are based on 0.35 um and 0.18um CMOS technology. Several analog chips together with self-trigger /derandomizer one allow to measure silicon sensors designed for…

Instrumentation and Detectors · Physics 2009-10-13 E. Atkin , A. Kluev , A. Silaev , A. Fedenko , D. Karmanov , M. Merkin , A. Voronin

This article presents several design techniques to fabricate micro-electro-mechanical systems (MEMS) using standard complementary metal-oxide semiconductor (CMOS) processes. They were applied to fabricate high yield CMOS-MEMS shielded…

Instrumentation and Detectors · Physics 2021-09-24 Juan Valle , Josep-María Sánchez-Chiva , Daniel Fernández , Jordi Madrenas

Microelectromechanical systems (MEMS) resonators serve as frequency selective components in applications ranging from biology to communications. In this paper, the dynamic behavior of an RF MEMS disk resonator is formulated using an…

Mesoscale and Nanoscale Physics · Physics 2016-12-07 Hamid T. Chorsi , Meysam T. Chorsi , Stephen D. Gedney

Memristors, uniquely characterized by their pinched hysteresis loop fingerprints, have attracted significant research interest over the past decade, due to their enormous potential for novel computation and artificial intelligence…

Applied Physics · Physics 2025-08-07 Erion Uka , Chun Zhao

Increase in image resolution require the ability of image sensors to pack an increased number of circuit components in a given area. On the the other hand a high speed processing of signals from the sensors require the ability of pixel to…

Emerging Technologies · Computer Science 2016-10-18 Kamilya Smagulova , Aigerim Tankimanova , Alex Pappachen James

At least 25 kinds of detector-like devices need to be integrated in Phase I of the High Energy Photon Source (HEPS), and the work needs to be carefully planned to maximise productivity with highly limited human resources. After a systematic…

Instrumentation and Detectors · Physics 2024-11-06 Qun Zhang , Peng-Cheng Li , Ling-Zhu Bian , Chun Li , Zong-Yang Yue , Cheng-Long Zhang , Zhuo-Feng Zhao , Yi Zhang , Gang Li , Ai-Yu Zhou , Yu Liu

We report multifunctional operation based on the nonlinear dynamics in a single microelectromechanical system (MEMS) resonator. This Letter focuses on a logic-memory device that uses a closed loop control and a nonlinear MEMS resonator in…

Mesoscale and Nanoscale Physics · Physics 2014-09-29 Atsushi Yao , Takashi Hikihara

Interface circuits are the key components that enable the hybrid integration of superconductor and semiconductor digital electronics. The design requirements of superconductor-semiconductor interface circuits vary depending on the…

Applied Physics · Physics 2026-01-16 Yerzhan Mustafa , Selçuk Köse

MEMS devices are typical systems where multiphysics simulations are unavoidable. In this work, we present possible applications of 3-D self-assembled SOI (Silicon-on-Insulator) MEMS such as, for instance, thermal actuators and flow sensors.…

Other Computer Science · Computer Science 2007-11-29 C. Mendez , C. Louis , S. Paquay , P. De Vincenzo , I. Klapka , V. Rochus , F. Iker , Nicolas André , J. -P. Raskin

Ultra-cold atoms can be manipulated using microfabricated devices known as atom chips. These have significant potential for applications in sensing, metrology and quantum information processing. To date, the chips are loaded by transfer of…

The ultimate goal of this research proposal is the creation of a micro-optomechanical intelligence. The proposal centers on the development and investigation of very large-scale integrated (VLSI) arrays of coupled M/NEMS devices as…

Mesoscale and Nanoscale Physics · Physics 2023-04-14 Samer Houri , Gaetan Kerschen

As the demand for ubiquitous connectivity and high-precision environmental awareness grows, integrated sensing and communication (ISAC) has emerged as a key technology for sixth-generation (6G) wireless networks. Intelligent metasurfaces…

Signal Processing · Electrical Eng. & Systems 2025-12-08 Shunyu Li , Tianqi Mao , Guangyao Liu , Fan Zhang , Ruiqi Liu , Meng Hua , Zhen Gao , Qingqing Wu , George K. Karagiannidis

It may be possible to reinvent how microelectronics are made using a two step process: (1) Synthesizing modular, nanometer-scale components -- transistors, sensors, and other devices -- and suspending them in a liquid "ink" for storage or…

Computers and Society · Computer Science 2023-03-21 Michael Filler , Benjamin Reinhardt

Accurate on-chip temperature sensing is critical for the optimal performance of modern CMOS integrated circuits (ICs), to understand and monitor localized heating around the chip during operation. The development of quantum computers has…