Related papers: Integrating MEMS and ICs
The transmission electron microscope (TEM) has become an essential tool for innovation in nanoscience, material science, and biology. Despite these instruments being widely used across both industry and academia, academics may hesitate to…
Microelectronic integration is a key enabler for the ubiquitous deployment of devices in large volumes ranging from MEMS and imaging sensors to consumer electronics. Such integration has also been achieved in photonics, where compact…
Photonic Integrated Circuits (PICs) provide superior speed, bandwidth, and energy efficiency, making them ideal for communication, sensing, and quantum computing applications. Despite their potential, PIC design workflows and integration…
Embedded systems are playing an increasingly important role in control engineering. Despite their popularity, embedded systems are generally subject to resource constraints and it is therefore difficult to build complex control systems on…
Micro-Electro-Mechanical Systems (MEMS) normally have fixed or moving structures with cross-sections of the order of microns ($\mu m$) and lengths of the order of tens or hundreds of microns. These structures are often plates or array of…
This paper surveys the characteristics of multimedia systems. Multimedia applications today are dominated by compression and decompression, but multimedia devices must also implement many other functions such as security and file…
Single-electron transistors (SETs) have been extensively used as charge sensors in many areas such as quantum computations. In general, the signals of SETs are smaller than those of complementary metal-oxide semiconductor (CMOS) devices,…
The paper discusses the importance and the issues of interfacing capacitive sensors. Two architectures applicable for interfacing capacitive sensors are presented. The first solution was designed to interface a capacitive humidity sensor…
Microelectromechanical systems (MEMS) gyroscopes are widely used, e.g. in modern automotive and consumer applications, and require signal stability and accuracy in rather harsh environmental conditions. In many use cases, device reliability…
Optical beam steering is key for optical communications, laser mapping (LIDAR), and medical imaging. For these applications, integrated photonics is an enabling technology that can provide miniaturized, lighter, lower cost, and more power…
Recent advances in photonic integration have propelled microwave photonic technologies to new heights. The ability to interface hybrid material platforms to enhance light-matter interactions has led to the developments of ultra-small and…
The depleted CMOS sensors are emerging as one of the main candidate technologies for future tracking detectors in high luminosity colliders. Its capability of integrating the sensing diode into the CMOS wafer hosting the front-end…
Programmable photonic integrated circuits (PICs) have recently emerged as an important technology for quantum information science and artificial neural networks. In particular, PICs with MEMS-based modulators have the advantages of…
The multidisciplinarity of robotics creates a need for robust integration methodologies that can facilitate the adoption of state-of-the-art research components in an industrial application. Unfortunately, there are no clear, community…
Memory system is often the main bottleneck in chipmultiprocessor (CMP) systems in terms of latency, bandwidth and efficiency, and recently additionally facing capacity and power problems in an era of big data. A lot of research works have…
Micro-scale implantable medical devices (IMDs) extend the immense benefits of sensors used in health management. However, their development is limited by many requirements and challenges, such as the use of safe materials, size…
Conventional optical displays using ITO (indium tin oxide) and LC (liquid crystal) materials present a lot of challenges in terms of long-term sustainability. We show here how it is possible to generate a cost effective and CMOS compatible…
Varifocal lenses, conventionally implemented by changing the axial distance between multiple optical elements, have a wide range of applications in imaging and optical beam scanning. The use of conventional bulky refractive elements makes…
Microelectromechanical systems (MEMS) have been applied to many measurement problems in physics, chemistry, biology and medicine. In parallel, cavity optomechanical systems have achieved quantum-limited displacement sensitivity and ground…
On-chip integrated metasurface driven by in-plane guided waves is of great interests in various light field manipulation applications such as colorful augmented reality and holographic display. However, it remains a challenge to design…