The paper discusses the importance and the issues of interfacing capacitive sensors. Two architectures applicable for interfacing capacitive sensors are presented. The first solution was designed to interface a capacitive humidity sensor designed and built for a humidity-dependent monolithic capacitor developed at Budapest University of Technology and Economics. The second case presents the possible read-out solutions for a SOI-MEMS accelerometer. Both of the architectures were built and tested in a discrete implementation to qualify the methods before the integrated realization. The paper presents a detailed comparison of the two methods
@article{arxiv.0802.3049,
title = {Comparison of Two Low-Power Electronic Interfaces for Capacitive Mems Sensors},
author = {G. Nagy and Z. Szucs and S. Hodossy and M. Rencz and A. Poppe},
journal= {arXiv preprint arXiv:0802.3049},
year = {2008}
}
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