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A capacitive flexible tactile sensor

Materials Science 2021-11-02 v1 Applied Physics
Authors: Dandan Yuan , Haoxin Shu , Yulong Bao , Bin Xu , Huan Wang
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Abstract

In this paper, a capacitive flexible tactile sensor was designed to measure the pressure of objects based on MEMS technology. This sensor is a structure of a 4x4 array, with metal Ag as the capacitive electrode, which forms the tactile sensing unit of the sensor. The structure of capacitive flexible tactile sensor was designed and an experimental platform was established to test the performance. The tests show that when the thickness of the intermediate layer is 2 mm and the density is medium, the sensor's sensitivity is the best while the time of both the response and the rebound is fast.

Keywords

sensors and measurement

Cite

@article{arxiv.2111.00412,
  title  = {A capacitive flexible tactile sensor},
  author = {Dandan Yuan and Haoxin Shu and Yulong Bao and Bin Xu and Huan Wang},
  journal= {arXiv preprint arXiv:2111.00412},
  year   = {2021}
}

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R2 v1 2026-06-24T07:19:32.681Z