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A hyperbolic metamaterial (HM) resonator is analyzed as a nano-antenna for enhancing the radiative emission of quantum emitters in its vicinity. It has been shown that the spontaneous emission rate by an emitter near a hyperbolic…
Silicon carbide (SiC) exhibits excellent material properties attractive for broad applications. We demonstrate the first SiC optomechanical microresonators that integrate high mechanical frequency, high mechanical quality, and high optical…
This article presents a comprehensive study and design methodology of co-integrated oscillators for nano mass sensing application based on resonant Nano-Electro-Mechanical-System (NEMS). In particular, it reports the capacitive with the…
The systematics of the size dependence of the resonant response of small metal particles and nuclei to incident electromagnetic radiation is studied. The known radius$^{-1}$ variation of the full width at half maximum (FWHM) in…
The aim of this work is to theoretically investigate the possibility of Kerr frequency combs in mechanical systems. In particular, whether microelectrome-chanical devices (MEMS) can be used to generate frequency combs in a manner that is…
This work reports on a technology-agnostic and frequency-independent methodology combining a-priori modeling, Finite Element Analysis (FEA), and experimental results for the characterization of acoustic losses in interdigitated…
This paper presents an optimized silicon-MEMS electromagnetic vibration energy harvester suitable for applications such as machine health monitoring. The harvester comprises a DRIE-etched silicon suspension, and pick-and-place N42 NdBFe…
We report on a giant enhancement in the thermal responsivity of the doubly-clamped GaAs microelectromechanical (MEMS) beam resonators by using the internal mode coupling effect. This is achieved by coupling the fundamental bending mode with…
A precise analytical treatment for predicting the behavior of nano-sized magneto-electro-elastic (MEE) antennas and resonators under incident acoustic waves requires consideration of multiphysics surface/interface effects, including…
This work presents recent advances in the development and the integration of an electrochemical (chemicalelectrical energy conversion) micro power generator used as a high voltage energy source for RF-MEMS powering. Autonomous MEMS require…
Inspired by recent graded metamaterials designs, we create phononic arrays of micro-resonators for frequency signal amplification and wave filtering. Leveraging suspended waveguides on a thick silicon substrate, we hybridize surface…
This paper is devoted to the unidimensional analysis of a 2-ports silicon resonator vibrating in thickness--extensional mode. Both excitation and detection ports are capacitive transducers used to control the system of longitudinal elastic…
Scanning Electron Microscopy (SEM) is indispensable in modern materials science, enabling high-resolution imaging across a wide range of structural, chemical, and functional investigations. However, SEM imaging remains constrained by…
Nowadays, silicon micro-cantilevers with different geometrical shapes are widely used as micro-electro-mechanical systems and, more recently, as force sensor probes in atomic force microscopy (AFM). During the last ten years, several…
Resonant modes determine the response of electromagnetic devices, including dielectric and plasmonic resonators. Relying on the degrees of freedom that metamaterials provide, this contribution shows how to design, at will, the resonant…
Shape transformation, a key mechanism for organismal survival and adaptation, has gained importance across fields as diverse as electronics and medicine. However, designing and controlling microscale shape-shifting materials remains a…
The applications of nanomechanical resonators range from biomolecule mass sensing to hybrid quantum interfaces. Their performance is often limited by internal material damping, which can be greatly reduced by using crystalline materials.…
Methods on reducing resonant frequencies and electrical sizes of resonators are reported in this paper. Theoreti-cal and numerical analysis has been used and the results for the broadside-coupled resonators from both studies exhibit good…
We present a theoretical and experimental study of superconducting ring resonators as an initial step toward their implementation in superconducting electronics and quantum technologies, with promising applications including superconducting…
Wireless transfer of power via high frequency microwave radiation using a miniature split ring resonator rectenna is reported. RF power is converted into DC power by integrating a rectification circuit with the split ring resonator. The…