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Memristors, uniquely characterized by their pinched hysteresis loop fingerprints, have attracted significant research interest over the past decade, due to their enormous potential for novel computation and artificial intelligence…
Active manipulation of mechanical waves at high frequencies opens opportunities in heat management, radio-frequency (RF) signal processing, and quantum technologies. Nanoelectromechanical systems (NEMS) are appropriate platforms for…
We present design, fabrication and characterization of a MEMS VCSEL which utilizes a silicon-on-insulator wafer for the microelectromechanical system and encapsulates the MEMS by direct InP wafer bonding, which improves the protection and…
Reconfigurable Intelligent Surfaces (RISs) have emerged as a promising technology for next-generation wireless communications, offering energy-efficient control of electromagnetic (EM) waves. While conventional RIS models based on phase…
We report in this paper the design, fabrication and experimental characterization of a piezoelectric MEMS microgenerator. This device scavenges the energy of ambient mechanical vibrations characterized by frequencies in the range of 1 kHz.…
To reduce transmit power, increase throughput, and improve communication range, radio systems---such as IoT sensor networks, Wi-Fi and cellular networks---benefit from the ability to direct their signals, to ensure that more of the…
The design of modular, passive, and static artificial metasurfaces to be used as electromagnetic skins (EMSs) of buildings for improving the coverage in urban millimeter-wave communication scenarios is addressed. Towards this end, an ad-hoc…
This paper investigates the performance of the micro-electro-mechanical systems resonant sensor used for particle detection and concentration measurement. These fine and ultra-fine particles such as particulate matter (PM), ferrous…
In this article the physics of horizontally polarized shear waves travelling across a locally resonant metasurface in an unconsolidated granular medium is experimentally and numerically explored. The metasurface is comprised of an…
This article presents several design techniques to fabricate micro-electro-mechanical systems (MEMS) using standard complementary metal-oxide semiconductor (CMOS) processes. They were applied to fabricate high yield CMOS-MEMS shielded…
Silicon carbide (SiC) excels in its outstanding mechanical properties, which are widely studied in Microelectromechanical systems (MEMS). Recently, the mechanical tuning of color centers in 4H-SiC has been demonstrated, broadening its…
Microelectromechanical systems (MEMS) gyroscopes are widely used, e.g. in modern automotive and consumer applications, and require signal stability and accuracy in rather harsh environmental conditions. In many use cases, device reliability…
Hybrid systems consisting of a quantum emitter coupled to a mechanical oscillator are receiving increasing attention for fundamental science and potential applications in quantum technologies. In contrast to most of the presented works, in…
Enhancing light-matter interactions at the nanoscale is foundational to nanophotonics, with epsilon near zero (ENZ) materials demonstrating significant potential.High-quality (Q) factor resonances maximizing these interactions are typically…
Nanomechanical resonators are used as high performance detectors in a variety of applications such as mass spectrometry and atomic force microscopy. Initial emphasis in nanomechanical resonant sensor research was on increasing the…
High-aspect-ratio mechanical resonators are pivotal in precision sensing, from macroscopic gravitational wave detectors to nanoscale acoustics. However, fabrication challenges and high computational costs have limited the…
Experiments involving micro- and nanomechanical resonators need to be carefully designed to reduce mechanical environmental noise. A small scale on-chip approach is to add an additional resonator to the system as a mechanical low-pass…
High-stress Si$_3$N$_4$ nanoresonators have become an attractive choice for electro- and optomechanical devices. Membrane resonators can achieve quality factor ($Q$) - frequency ($f$) products exceeding $10^{13}$ Hz, enabling (in principle)…
On-chip actuation and readout of mechanical motion is key to characterize mechanical resonators and exploit them for new applications. We capacitively couple a silicon nitride membrane to an off resonant radio-frequency cavity formed by a…
We describe measurements on microwave coplanar resonators designed for quantum bit experiments. Resonators have been patterned onto sapphire and silicon substrates, and quality factors in excess of a million have been observed. The resonant…