This paper presents an optimized silicon-MEMS electromagnetic vibration energy harvester suitable for applications such as machine health monitoring. The harvester comprises a DRIE-etched silicon suspension, and pick-and-place N42 NdBFe magnets and copper coils, housed in a 3D-printed package. The harvester is designed to operate near 50 Hz with 0.5-1 g vibrations using a long-stroke suspension. Multi-domain harvester optimization results in an open-circuit voltage of 1.7 V, a matched-load power output of 2.2 mW, and a matched-load power-output density of 1.23 mW/cm3 at 1.1 g with a resonance frequency of 76.3 Hz.
@article{arxiv.1910.02131,
title = {A Silicon MEMS EM vibration energy harvester},
author = {Y. Yang and U. Radhakrishna and D. Ward and A. P. Chandrakasan and J. H. Lang},
journal= {arXiv preprint arXiv:1910.02131},
year = {2020}
}