English

Electron Optic Design of Arrayed E-Beam Microcolumns Based Systems for Wafer Defects Inspection

Optics 2008-05-06 v1 Instrumentation and Detectors
Authors: V. V. Kazmiruk , T. N. Savitskaja
View on arXiv ↗ PDF ↗

Abstract

In this paper is considered a matter of the system for wafer defect inspection (WDIS) practical realization. Such systems are on the agenda as the next generation and substitution for light optics and single ee-beam based WDISs.

Cite

@article{arxiv.0805.0495,
  title  = {Electron Optic Design of Arrayed E-Beam Microcolumns Based Systems for Wafer Defects Inspection},
  author = {V. V. Kazmiruk and T. N. Savitskaja},
  journal= {arXiv preprint arXiv:0805.0495},
  year   = {2008}
}

Comments

16 pages, 18 figures

Related papers

View all related →
Instrumentation and Detectors · Physics
Consideration of arrayed $e$-beam microcolumn based systems potentialities for wafer defects inspection
V. V. Kazmiruk, T. N. Savitskaja
2008-05-05
Materials Science · Physics
New techniques for imaging and identifying defects in electron microscopy
Daniel S. Gianola, T. Ben Britton, Stefan Zaefferer
2019-03-19
Optics · Physics
Multiplexed broadband beam steering system utilizing high speed MEMS mirrors
Caleb Knoernschild, Changsoon Kim, Felix P. Lu, Jungsang Kim
2015-05-13
Computer Vision and Pattern Recognition · Computer Science
Automated Semiconductor Defect Inspection in Scanning Electron Microscope Images: a Systematic Review
Thibault Lechien, Enrique Dehaerne, Bappaditya Dey, Victor Blanco +3
2023-08-21
Optics · Physics
Impedance-matched microwave lens
Pekka Alitalo, Olli Luukkonen, Joni Vehmas, Sergei Tretyakov
2009-11-13
Instrumentation and Methods for Astrophysics · Physics
MEMS practice, from the lab to the telescope
Katie M. Morzinski, Andrew P. Norton, Julia Wilhelmson Evans, Layra Reza +7
2015-06-04
Instrumentation and Detectors · Physics
Design of a wavelength frame multiplication system using acceptance diagrams
D. Nekrassov, C. Zendler, K. Lieutenant
2013-07-18
Optics · Physics
Testing and design of a lens system for atom trapping and fluorescence detection
P Baranowski, J Zacks, G Hechenblaikner, C J Foot
2007-05-23
Machine Learning · Computer Science
Automated Discovery of Laser Dicing Processes with Bayesian Optimization for Semiconductor Manufacturing
David Leeftink, Roman Doll, Heleen Visserman, Marco Post +3
2025-12-01
Optics · Physics
Electrically pumped single-defect light emitters in WSe$_2$
S. Schwarz, A. Kozikov, F. Withers, J. K. Maguire +8
2016-07-14
Astrophysics · Physics
The Durham Micro-Optics Programme
J. Schmoll, C. M. Dubbeldam, D. J. Robertson, J. Yao
2009-11-13
Materials Science · Physics
Optical beam-induced scattering mode of mid-IR laser microscopy: a method for defect investigation in near-surface and near-interface regions of bulk semiconductors
O. V. Astafiev, V. P. Kalinushkin, V. A. Yuryev
2015-03-19
Other Computer Science · Computer Science
Design and Development of Novel Electroplating Spring Frame Mems Structure Specimens for the Microtensile Testing of Thin Film Materials
Ming-Tzer Lin, Chi-Jia Tong, Chung-Hsun Chiang
2007-11-29
Materials Science · Physics
Application of elastic mid-IR-laser-light scattering for non-destructive inspection in microelectronics
V. P. Kalinushkin, V. A. Yuryev, O. V. Astafiev, A. N. Buzynin +1
2015-01-20
Instrumentation and Detectors · Physics
Designing electrostatic MEMS-based electron optics: the case of the spiral phase plate
Payam Habibdazeh Kavkani, Amir H. Tavabi, Paolo Rosi, Alberto Roncaglia +7
2026-02-24
Pattern Formation and Solitons · Physics
Exploiting bifurcations in waveguide arrays for light detectors
N. Karjanto, H. Susanto
2017-06-05
Nuclear Experiment · Physics
A Compact Solid State Detector for Small Angle Particle Tracking
S. Altieri, O. Barnaba, A. Braghieri, M. Cambiaghi +10
2009-10-31
Disordered Systems and Neural Networks · Physics
Probing electron beam induced transformations on a single defect level via automated scanning transmission electron microscopy
Kevin M. Roccapriore, Matthew G. Boebinger, Ondrej Dyck, Ayana Ghosh +3
2022-07-27
Materials Science · Physics
Mid-IR-laser microscopy as a tool for defect investigation in bulk semiconductors
O. V. Astafiev, V. P. Kalinushkin, V. A. Yuryev
2015-01-13
Materials Science · Physics
Modified Electron Beam Induced Deposition of Metal Nanostructure Arrays using a Parallel Electron Beam
Joysurya Basu, C. Barry Carter, R. Divakar, Vijay B. Shenoy +1
2009-11-13
Optics · Physics
Wide-Field Reflective Imaging with an Epi-Illumination Multi-Camera Array Microscope
Xiangjiang Bao, Lucas Kreiss, Clare B. Cook, Haoyu Gong +2
2025-10-17
Computer Vision and Pattern Recognition · Computer Science
Deep Open-Set Recognition for Silicon Wafer Production Monitoring
Luca Frittoli, Diego Carrera, Beatrice Rossi, Pasqualina Fragneto +1
2022-08-31
Nuclear Experiment · Physics
An einzel lens with a diagonal-slit central electrode to combine steering and focusing of a low energy ion beam
P. Mandal, G. Sikler, M. Mukherjee
2011-02-28
Materials Science · Physics
Elastic Mid-Infrared Light Scattering: a Basis for Microscopy of Large-Scale Electrically Active Defects in Semiconducting Materials
V. P. Kalinushkin, V. A. Yuryev, O. V. Astafiev
2011-05-17
Materials Science · Physics
Practical considerations for crystallographic and microstructure mapping with direct electron detector-based electron backscatter diffraction
Tianbi Zhang, Ruth Birch, Graeme Francolini, Ebru Karakurt Uluscu +1
2025-10-17
R2 v1 2026-06-21T10:37:22.149Z