Consideration of arrayed $e$-beam microcolumn based systems potentialities for wafer defects inspection
Instrumentation and Detectors
2008-05-05 v1
Abstract
The -beam column which is intended on defects inspection is considered. The defects which are to be examined or potentially might be examined at inspection stage are briefly considered. Interrelations between the system parameters is ascertaining and the ways of optimization and the technical requirements to the system in whole are discussed. As a result, we find the optimal combinations of the system parameters for the purpose.
Keywords
Cite
@article{arxiv.0805.0248,
title = {Consideration of arrayed $e$-beam microcolumn based systems potentialities for wafer defects inspection},
author = {V. V. Kazmiruk and T. N. Savitskaja},
journal= {arXiv preprint arXiv:0805.0248},
year = {2008}
}
Comments
17 pages, 18 figures