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In this paper is considered a matter of the system for wafer defect inspection (WDIS) practical realization. Such systems are on the agenda as the next generation and substitution for light optics and single $e$-beam based WDISs.

Optics · Physics 2008-05-06 V. V. Kazmiruk , T. N. Savitskaja

Defects in crystalline materials control the properties of materials, and their characterization focuses our strategies to optimize performance. Electron microscopy has served as the backbone of our understanding of defect structure and…

Materials Science · Physics 2019-03-19 Daniel S. Gianola , T. Ben Britton , Stefan Zaefferer

After a review of linear imperfections and their causes, we discuss how to model them, the diagnostic equipment needed to monitor them, and the correction algorithms to fix the problem they cause. We first address linear systems - beam…

Accelerator Physics · Physics 2020-06-22 V. Ziemann

Woven shell structures are beneficial for applications requiring lightweight, damage resilience, and design tunability, such as in wearable devices, soft robotics, and aerospace systems. A fundamental component of woven structures is the…

Applied Physics · Physics 2025-12-02 Jaimie Krankel , Guowei Wayne Tu , Evgueni T. Filipov

Multi-layered scintillating fibre arrays read-out are commonly used as high resolution charged particle hodoscopes. Fibres of a column along the geometrical trajectory of incident particles are typically grouped to one pixel of a…

Nuclear Experiment · Physics 2008-11-26 P. Achenbach , L. Nungesser , J. Pochodzalla

A conventional method to determine beam parameters is using the profile measurements and converting them into the values of twiss parameters and beam emittance at a specified position. The beam information can be used to improve transverse…

Accelerator Physics · Physics 2015-07-14 Ji-Ho Jang , Hyo Jae Jang , Dong-O Jeon

As a type of search design, a detecting array can be used to generate test suites to identify and detect faults caused by interactions of factors in a component-based system. Recently, the construction and optimality of detecting arrays…

Statistics Theory · Mathematics 2014-08-15 Ce Shi , Yu Tang , Jianxing Yin

A growing need exists for efficient and accurate methods for detecting defects in semiconductor materials and devices. These defects can have a detrimental impact on the efficiency of the manufacturing process, because they cause critical…

Computer Vision and Pattern Recognition · Computer Science 2023-08-21 Thibault Lechien , Enrique Dehaerne , Bappaditya Dey , Victor Blanco , Sandip Halder , Stefan De Gendt , Wannes Meert

This survey paper offers a comprehensive review of methodologies utilizing machine learning (ML) classification techniques for identifying wafer defects in semiconductor manufacturing. Despite the growing body of research demonstrating the…

Machine Learning · Computer Science 2024-03-21 Kamal Taha

Beam diagnostics and instrumentation are an essential part of any kind of accelerator. There is a large variety of parameters to be measured for observation of particle beams with the precision required to tune, operate, and improve the…

Accelerator Physics · Physics 2020-05-19 Gero Kube

The design of an interferometric array should allow optimal instrumental response regarding all possible source positions, times of integration and scientific goals. It should also take into account constraints such as forbidden regions on…

Astrophysics · Physics 2009-11-07 F. Boone

The determination of beam parameters is essential for the operation and development of any accelerator facility. The working principle of frequently used beam instruments for electron and proton beams is discussed. The article comprises of…

Accelerator Physics · Physics 2020-09-23 Peter Forck

Examining and controlling the interaction between semiconductor quantum qubits and their environment can boost semiconductor quantum technologies, which have many applications in table-top quantum computing hardware. Electron beams in…

Quantum Physics · Physics 2026-05-12 Nahid Talebi

A future Linear Collider is well suited for discovering physics beyond the Standard Model, for revealing the structure of the underlying physics as well as for performing high precision tests of the Standard Model. The use of polarised…

High Energy Physics - Phenomenology · Physics 2007-05-23 Gudrid Moortgat-Pick

This chapter takes a look at how beam diagnostic systems can be used to commission, optimise and solve issues on high energy colliders.

Accelerator Physics · Physics 2020-06-03 Rhodri Jones

Quantitative measurements of extended defects in crystalline materials are important in understanding material behaviour. X-ray line profile analysis provides a complement to direct counting in the electron microscope, but is an indirect…

Materials Science · Physics 2022-03-28 C P Race , T Ungar , G Ribarik

We consider optimal experimental design (OED) for Bayesian inverse problems, where the experimental design variables have a certain multiway structure. Given $d$ different experimental variables with $m_i$ choices per design variable $1 \le…

Numerical Analysis · Mathematics 2025-06-03 Hugo Díaz , Arvind K. Saibaba , Srinivas Eswar , Vishwas Rao , Zichao Wendy Di

Future high-energy $e^+e^-$ colliders will provide some of the most precise tests of the Standard Model. Statistical uncertainties are expected to improve by orders of magnitude over current measurements. This provides a new challenge in…

High Energy Physics - Experiment · Physics 2021-05-21 Jakob Beyer , Jenny List

This paper addresses the problem of evaluating the quality of finite element meshes for the purpose of structural mechanic simulations. It proposes the application of a machine learning model trained on data collected from expert…

Machine Learning · Computer Science 2021-07-23 Joachim Sprave , Christian Drescher

In this paper we suggest an analytic model, and derive simple formulas, for the beam dynamics in a wakefield structure of arbitrary cross-section. The results could be applied to estimate an upper limit of the projected beam size in devices…

Accelerator Physics · Physics 2019-02-15 Dae Heun Koh , Stanislav S. Baturin
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