The present study presents a new micro electromagnetic actuator utilizing a PDMS membrane with a magnet. The actuator is integrated with micro coils to electromagnetically actuate the membrane and results in a large deflection. The micro electromagnetic actuator proposed in this study is easily fabricated and is readily integrated with existing bio-medical chips due to its planar structure.
@article{arxiv.0805.0935,
title = {Design and Fabrication of a Novel Micro Electromagnetic Actuator},
author = {C. -Y. Lee and Zgen-Hui Chen and Hsien-Tseng Chang and Chiang-Ho Cheng and Chih-Yung Wen},
journal= {arXiv preprint arXiv:0805.0935},
year = {2008}
}
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Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838)