This study is focused on the mechanical characterization of materials used in microelectronic and micro- electromechanical systems (MEMS) devices. In order to determine their mechanical parameters, a new deformation bench test with suitable micromachined specimens have been developed. Uniaxial tensile tests were performed on "low cost" specimens, consisting in electroplated thin copper films and structures, deposited on a polimide type substrate. Moreover, a cyclic mechanical actuation via piezoelectric actuators was tested on the same deformation bench. These experiments validate the device for performing dynamic characterization of materials, and reliability studies of different microstructures.
@article{arxiv.0805.0942,
title = {Micro-tensile tests on micromachined metal on polymer specimens: elasticity, plasticity and rupture},
author = {C. Seguineau and M. Ignat and C. Malhaire and S. Brida and X. Lafontan and J. -M. Desmarres and C. Josserond and L. Debove},
journal= {arXiv preprint arXiv:0805.0942},
year = {2008}
}
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Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838)