Here, we present a micro-electromechanical system (MEMS) for the investigation of the electromechanical coupling in graphene and potentially related 2D materials. Key innovations of our technique include: (1) the integration of graphene into silicon-MEMS technology; (2) full control over induced strain fields and doping levels within the graphene membrane and their characterization via spatially resolved confocal Raman spectroscopy; and (3) the ability to detect the mechanical coupling of the graphene sheet to the MEMS device with via their mechanical resonator eigenfrequencies.
@article{arxiv.2103.13652,
title = {Engineering tunable strain fields in suspended graphene by microelectromechanical systems},
author = {Jens Sonntag and Matthias Goldsche and Tymofiy Khodkov and Gerard Verbiest and Sven Reichardt and Nils von den Driesch and Dan Buca and Christoph Stampfer},
journal= {arXiv preprint arXiv:2103.13652},
year = {2021}
}