Thermal micro-actuators are a promising solution to the need for large-displacement, gentle handling force, low-power MEMS actuators. Potential applications of these devices are micro-relays, assembling and miniature medical instrumentation. In this paper the development of thermal microactuators based on SU-8 polymer is described. The paper presents the development of a new microgripper which can realize a movement of the gripping arms with possibility for positioning and manipulating of the gripped object. Two models of polymeric microgripper electrothermo- mechanical actuated, using low actuation voltages, designed for SU-8 polymer fabrication were presented. The electro-thermal microgrippers were designed and optimized using finite element simulations. Electro-thermo-mechanical simulations based on finite element method were performed for each of the model in order to compare the results. Preliminary experimental tests were carried out.
Cite
@article{arxiv.0805.0901,
title = {Design Optimization for an Electro-Thermally Actuated Polymeric Microgripper},
author = {R. Voicu and R. Muller and L. Eftime},
journal= {arXiv preprint arXiv:0805.0901},
year = {2008}
}
Comments
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838)