相关论文: Nomarski imaging interferometry to measure the dis…
The displacement field of an object surface can be measured by using speckle interferometry. This technique is based on the phenomenon of laser speckle and consists in correlating speckle interferograms taken after and before the…
As the fields of optical microscopy, semiconductor technology and fundamental science increasingly aim for precision at or below the nanoscale, there is a burgeoning demand for sub-nanometric displacement and position sensing. We show that…
A novel approach was derived to compute the elastic displacement field from a measured elastic deformation field (i.e., deformation gradient or strain). The method is based on integrating the deformation field using Finite Element…
The optical elements comprised of sub-diffractive light scatterers, or metasurfaces, hold a promise to reduce the footprint and unfold new functionalities of optical devices. A particular interest is focused on metasurfaces for manipulation…
This study describes a unique optical approach for the noncontact measurement of linear and angular displacement. Compared to previous methods, the sensor system here based on the dual-beam phase-modulated feedback interferometry provides…
Interferometry can measure the shape or the material density of a system that could not be measured otherwise by recording the difference between the phase change of a signal and a reference phase. This difference is always between $-\pi$…
We have studied the electrically induced off-plane surface displacement on two microelectronic devices using Scanning Joule Expansion Microscopy (SJEM). We present the experimental method and surface displacement results. We show that they…
Diverse applications in photonics and microwave engineering require a means of measurement of the instantaneous frequency of a signal. A photonic implementation typically applies an interferometer equipped with three or more output ports to…
Nanoelectromechanical systems (NEMSs) are emerging nanoscale elements at the crossroads between mechanics, optics and electronics, with significant potential for actuation and sensing applications. The reduction of dimensions compared to…
This paper addresses interferometric phase (InPhase) image denoising, i.e., the denoising of phase modulo-2p images from sinusoidal 2p-periodic and noisy observations. The wrapping discontinuities present in the InPhase images, which are to…
Recently, it was shown that vector beams can be utilized for fast kinematic sensing via measurements of their global polarization state [Optica 2(10), 864 (2015)]. The method relies on correlations between the spatial and polarization…
Multi-mode optical interferometers represent the most viable platforms for the successful implementation of several quantum information schemes that take advantage of optical processing. Examples range from quantum communication, sensing…
Optical levitation of nanoscale particles has emerged as a platform for precision measurement. Extremely low damping, together with optical interferometric position detection, makes possible exquisite force measurement and promises…
This publication presents a novel interferometric method for the simultaneous spatially resolved analysis of an object under test regarding the phase transmission function and the magnitude and orientation of dichroism. Analogous to the…
Precise measurements in optical and atomic systems often rely on differential interferometry. This method allows to handle large and correlated phase noise contributions -- such as environmental vibrations, thermal fluctuations, or…
In this article, we present a deflection measurement setup for Atomic Force Microscopy (AFM). It is based on a quadrature phase differential interferometer: we measure the optical path difference between a laser beam reflecting above the…
Intensity interferometry removes the stringent requirements on mechanical precision and atmospheric corrections that plague all amplitude interferometry techniques at the cost of severely limited sensitivity. A new idea we recently…
Non-intrusive displacement measurement technique has a distinct edge over displacement sensors working in contact mode. Laser Doppler Vibrometry based schemes (LDV) offer such an advantage. However, the measurements are limited up to…
Cosmological observations from ground at millimetre and sub-millimetre wavelengths are affected by atmospheric absorption and consequent emission. The low and high frequency (sky noise) fluctuations of atmospheric performance imply careful…
Measurements of the deflection induced by thermal noise have been performed on a rectangular atomic force microscope cantilever in air. The detection method, based on polarization interferometry, can achieve a resolution of 1E-14 m/rtHz in…