相关论文: MEMS chip-based single proof-mass triaxial fiber-o…

In this paper, a novel coarse-to-fine optical MEMS accelerometer based on the Fabry Perot (FP) interferometer is proposed. The mechanical structure consists of a proof mass that is suspended by four L-shaped springs. The deflection of the…

In this paper, a differential MOEMS accelerometer based on the Fabry-Perot (FP) micro-cavities is presented. The optical system of the device consists of two FP cavities and the mechanical system is composed of a proof mass that is…

In this paper, a closed-loop micro-opto-electro-mechanical system (MOEMS) accelerometer based on the Fabry-P\'erot (FP) interferometer is presented. The FP cavity is formed between the end of a cleaved single-mode optical fiber and the…

This paper presents the design, simulation, and analytical modeling of the single proposed axis MEMSbased capacitive accelerometer. Analytical modeling has been done for frequency and displacement sensitivity. The performance of the…

We present a highly compact and fully monolithic optomechanical accelerometer fabricated of a single wafer of fused-silica with a total volume of less than 2cc and a total mass of approximately 4 grams. This sensor demonstrates an…

This study presents the design, fabrication, and test of a micro accelerometer with intrinsic processing capabilities, that integrates the functions of sensing and computing in the same MEMS. The device consists of an inertial mass…

The calibration of MEMS triaxial gyroscopes is crucial for achieving precise attitude estimation for various wearable health monitoring applications. However, gyroscope calibration poses greater challenges compared to accelerometers and…

We report on a compact, highly sensitive all-fiber accelerometer suitable for low frequency and low amplitude vibration sensing. The sensing elements in the device are two short segments of strongly coupled asymmetric multicore fiber (MCF)…

The monitoring of accelerations is essential for a variety of applications ranging from inertial navigation to consumer electronics. The basic operation principle of an accelerometer is to measure the displacement of a flexibly mounted test…

Multiple Electrostatic Quadrupole Array Linear Accelerators (MEQALACs) provide an opportunity to realize compact radio-frequency (RF) accelerator structures that can deliver very high beam currents. MEQALACs have been previously realized…

Triaxial vibration sensor are widely used used in various application. Recently, low-cost sensors based on micro electro mechanical system (MEMS) technology are also becoming more widely adopted. However, their measurement accuracy can be…

We report on developing, characterizing, and verifying a compact, monolithic laser interferometric assembly designed for high-precision two- and three-axis displacement measurements in coordinate positioning systems. The design targets OEM…

Beam combiners are important components of an optical/infrared astrophysical interferometer, with many variants as to how to optimally combine two or more beams of light to fringe-track and obtain the complex fringe visibility. One such…

Microelectromechanical systems (MEMS) have been applied to many measurement problems in physics, chemistry, biology and medicine. In parallel, cavity optomechanical systems have achieved quantum-limited displacement sensitivity and ground…

Zero-field optically pumped magnetometers (OPMs) have emerged as an important technology for biomagnetism due to their ulta-sensitive performance, contained within a non-cryogenic small-scale sensor-head. The compactness of such OPMs is…

We report high efficiency, miniaturized, ultra-fast coherent beam combining with 3D printed micro-optics directly on the tip of a multicore fiber bundle. The highly compact device foot-print (180 micron diameter) facilitates its…

This paper developed an efficient method for calibrating triaxial MEMS gyroscopes, which can be effectively utilized in the field environment. The core strategy is to utilize the criterion that the dot product of the measured gravity and…

Micro-electro mechanical systems (MEMS) thermal flow sensors are increasingly used for compact, low-power flow monitoring in biomedical applications. However, silicon-based method for sensor fabrication is limited by high cost, rigidity,…

In the recent years, metasurfaces, being flat and lightweight, have been designed to replace bulky optical components with various functions. We demonstrate a monolithic Micro-Electro-Mechanical System (MEMS) integrated with a…

Accelerometers offer motion sensing capabilities across a wide range of areas, enabling navigational awareness in consumer goods and defense applications, and playing a key role in monitoring and control systems. To date, on-chip…