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相关论文: Thermally Induced Refractive Index Trimming of Vis…

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We present suspended heater structures fabricated in a standard C- and O-band silicon (Si) photonics platform that can achieve sufficiently high local temperatures to induce effective refractive index trimming of Si and silicon nitride…

Phase-sensitive integrated photonic devices are highly susceptible to minor manufacturing deviations, resulting in significant performance inconsistencies. This variability has limited the scalability and widespread adoption of these…

We demonstrate that n-doped resistive heaters in silicon waveguides show photoconductive effects with high responsivities. These photoconductive heaters, integrated into microring resonator (MRR)-based filters, were used to automatically…

Limited by equipment precision, manufacturing deviations in waveguide width, etch depth, and layer thickness inevitably occur in photonic integrated circuits (PICs). These variations cause initial phase errors, compromising the reliability…

光学 · 物理学 2025-06-25 Yating Wu , Haozhe Sun , Bo Xiong , Yalong Yv , Jiale Zhang , Zhaojie Zheng , Wei Ma , Tao Chu

Silicon and germanium are perhaps the two most well-understood semiconductor materials in the context of solid state device technologies and more recently micromachining and nanotechnology. Meanwhile, these two materials are also important…

光学 · 物理学 2009-11-11 Bradley J. Frey , Douglas B. Leviton , Timothy J. Madison

Silicon nitride (SiN) drumhead resonators offer a promising platform for thermal sensing due to their high mechanical quality factor and the high temperature sensitivity of their resonance frequency. As such, gaining an understanding of…

应用物理 · 物理学 2021-11-12 Nikaya Snell , Chang Zhang , Gengyang Mu , Alexandre Bouchard , Raphael St-Gelais

Free-standing silicon nitride (SiN) mechanical resonators are of central interests in applications such as temperature and mass sensing, and for fundamental optomechanical reasearch. Understanding thermal coupling between a membrane…

应用物理 · 物理学 2021-07-08 Chang Zhang , Mathieu Giroux , Thea Abdul Nour , Raphael St-Gelais

We have measured the thermal properties of suspended membranes from 10 K to 300 K for two amplitudes of internal stress (about 0.1 GPa and 1 GPa) and for two different thicknesses (50 nm and 100 nm). The use of the original 3 \omega…

This paper introduces a thermal infrared detector utilizing a nano-optomechanical silicon nitride (SiN) resonator, equipped with a free-space impedance-matched (FSIM) absorber composed of a platinum (Pt) thin film, offering a broadband…

Using the Cryogenic, High-Accuracy Refraction Measuring System (CHARMS) at NASA's Goddard Space Flight Center, we have measured the absolute refractive index of five specimens taken from a very large boule of Corning 7980 fused silica from…

光学 · 物理学 2008-05-02 Douglas B. Leviton , Bradley J. Frey

Silicon photonic ring resonator thermometers have been shown to provide temperature measurements with a 10 mK accuracy. In this work we identify and quantify the intrinsic on-chip impairments that may limit further improvement in…

Silicon photonic devices fundamental to high-density wavelength-division multiplexed (DWDM) optical links and photonic switching networks, such as resonant modulators and Mach-Zehnder interferometers (MZIs), are highly sensitive to…

Integrated photonic circuits have transformed data communication, biosensing, and light detection and ranging, and hold wide-ranging potential for optical computing, optical imaging and signal processing. These applications often require…

The utilization and engineering of thermo-optic effects have found broad applications in integrated photonic devices, facilitating efficient light manipulation to achieve various functionalities. Here, we perform both an experimental…

光学 · 物理学 2025-02-05 David J. Moss

This work demonstrates a fast thermo-optic switching mechanism on silicon nitride on insulator platform leveraging parity-time symmetry breaking. The cladding-free design enables low-loss optical propagation in a partially metal-covered…

Thin films of TiN were sputter-deposited onto Si and sapphire wafers with and without SiN buffer layers. The films were fabricated into RF coplanar waveguide resonators, and internal quality factor measurements were taken at millikelvin…

We design a resistive heater optimized for efficient and low-loss optical phase modulation in a silicon-on-insulator (SOI) waveguide and characterize the fabricated devices. Modulation is achieved by flowing current perpendicular to a new…

Integrated photonic devices made of silicon nitride (SiN), which can be integrated with silicon-on-insulator and III-V platforms, are expected to drive the expansion of silicon photonics technology. However, the relatively low refractive…

光学 · 物理学 2025-07-17 Julian L. Pita Ruiz , Narges Dalvand , Michaël Ménard

Toward measuring the thermal properties of exfoliated atomically thin materials, we demonstrate simultaneous measurements of the thermal conductivity and specific heat in suspended membranes. We use the 3{\omega} technique applied to…

材料科学 · 物理学 2026-04-28 Yiwei Le , Erdong Song , Jason Li , Erik A. Henriksen

Recent progress in the 4H-silicon-carbide-on-insulator (4H-SiCOI) platform has resulted in the demonstration of essential building blocks such as low-loss waveguides and microresonators. In this work, we add tunability to the 4H-SiCOI…

光学 · 物理学 2025-06-19 Wenhan Sun , Ruixuan Wang , Jingwei Li , Haipeng Zhang , Zhensheng Jia , Qing Li
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