相关论文: Vibration Sensitivity of one-port and two-port MEM…
In this work, we use MEMS microphones as vibration sensors to simultaneously classify texture and estimate contact position and velocity. Vibration sensors are an important facet of both human and robotic tactile sensing, providing fast…
Vibrational spectroscopy is a ubiquitous technology that derives the species, constituents, and morphology of an object from its natural vibrations. However, the vibrational spectra of mesoscopic particles - including most biological cells…
Localization of normal modes is used in recent microelectromechanical systems (MEMS) technologies with orders of magnitude improvements in sensitivity. A pair of eigenvalues veer, or avoid crossing each other, as a single parameter of a…
This paper is devoted to the unidimensional analysis of a 2-ports silicon resonator vibrating in thickness--extensional mode. Both excitation and detection ports are capacitive transducers used to control the system of longitudinal elastic…
Microelectromechanical systems (MEMS) have been applied to many measurement problems in physics, chemistry, biology and medicine. In parallel, cavity optomechanical systems have achieved quantum-limited displacement sensitivity and ground…
This paper demonstrates a vibration test for a resonant MEMS scanning system in operation to evaluate the vibration immunity for automotive lidar applications. The MEMS mirror has a reinforcement structure on the backside of the mirror,…
We present simulations of the dynamic and temperature dependent behavior of Micro-Electro-Mechanical Systems (MEMS) by utilizing recently developed parallel codes which enable a coupling of length scales. The novel techniques used in this…
This article focuses on the prediction of the vibration frequency response of handheld probes. A novel approach that involves machine learning and readily available data from probes was explored. Vibration probes are efficient and…
Real-time, low-cost, and wireless mechanical vibration monitoring is necessary for industrial applications to track the operation status of equipment, environmental applications to proactively predict natural disasters, as well as…
Two-point microrheology measurements from widely separated colloidal particles approach the bulk viscosity of the host medium more reliably than corresponding single point measurements. In addition, active microrheology offers the advantage…
Scanning tunneling microscopy (STM) and micro-electromechanical systems (MEMS) have traditionally addressed vastly different length scales - one resolving atoms, the other engineering macroscopic motion. Here we unite these two fields to…
Sensors and actuators based on resonant micro-electro-mechanical systems (MEMS), such as scanning micro mirrors, are well-established in automotive and consumer products. As the areas of application broaden, the requirements for the MEMS…
Contact-based vibrations play a critical role in the dynamics of granular materials. Significant insights into vibrational granular dynamics have been obtained with reduced-dimensional systems containing macroscale particles. We study…
A semi-analytical study of the acoustic radiation losses associated with various transverse vibration modes of a micromechanical (MEMS) annular resonator is presented. The quality factor, Q, of such resonators is of interest in many…
Vibrations can cause noise in scanning probe microscopies. Relative vibrations between the scanning sensor and the sample are important but can be more difficult to determine than absolute vibrations or vibrations relative to the…
The complex physics behind electroadhesion-based tactile displays poses an enormous modeling challenge since not only the fingerpad structure with multiple nonlinear layers, but also the roughness at the microscopic scale play a decisive…
Recognizing surfaces based on their vibration signatures is useful as it can enable tagging of different locations without requiring any additional hardware such as Near Field Communication (NFC) tags. However, previous vibration based…
High-frequency micrometrical vibrations have been shown to greatly influence the adhesive performance of soft interfaces, however a detailed comparison between theoretical predictions and experimental results is still missing. Here, the…
Glasses show vibrational properties that are markedly different to those of crystals which are known as phonons. For example, excess low-frequency modes (the so-called boson peak), vibrational localization, and strong scattering of phonons…
Triaxial vibration sensor are widely used used in various application. Recently, low-cost sensors based on micro electro mechanical system (MEMS) technology are also becoming more widely adopted. However, their measurement accuracy can be…