相关论文: Design, fabrication and characterization of kineti…
We use the principles of cavity optomechanics to design a resonant mechanical force sensor for atomic force microscopy. The sensor is based on a type of electromechanical coupling, dual to traditional capacitive coupling, whereby the motion…
Nanometer-scale structures with high aspect ratio such as nanowires and nanotubes combine low mechanical dissipation with high resonance frequencies, making them ideal force transducers and scanning probes in applications requiring the…
We demonstrate AFM imaging with a microcantilever force transducer where an integrated superconducting microwave resonant circuit detects cantilever deflection using the principles of cavity optomechanics. We discuss the detector…
Sensitive transduction of the motion of a microscale cantilever is central to many applications in mass, force, magnetic resonance, and displacement sensing. Reducing cantilever size to nanoscale dimensions can improve the bandwidth and…
We present a detailed modeling and characterization of our scalable microwave nanoprobe, which is a micro-fabricated cantilever-based scanning microwave probe with separated excitation and sensing electrodes. Using finite-element analysis,…
Since the advent of atomic force microscopy, mechanical resonators have been used to study a wide variety of phenomena, such as the dynamics of individual electron spins, persistent currents in normal metal rings, and the Casimir force. Key…
Nanomechanical oscillators have been employed as transducers to measure force, mass and charge with high sensitivity. They are also used in opto- or electromechanical experiments with the goal of quantum control and phenomena of mechanical…
We report the development of a scanning force microscope based on an ultra-sensitive silicon nitride membrane transducer. Our development is made possible by inverting the standard microscope geometry - in our instrument, the substrate is…
We present a compact current sensor based on a superconducting microwave lumped-element resonator with a nanowire kinetic inductor, operating at 4.2 K. The sensor is suitable for multiplexed readout in GHz range of large-format arrays of…
In optical detection setups to measure the deflection of micro-cantilevers, part of the sensing light is absorbed, heating the mechanical probe. We present experimental evidences of a frequency shift of the resonant modes of a cantilever…
We present a "nanoladder" geometry that minimizes the mechanical dissipation of ultrasensitive cantilevers. A nanoladder cantilever consists of a lithographically patterned scaffold of rails and rungs with feature size $\sim$ 100 nm.…
We have developed a low-temperature scanning probe microscope using a quartz tuning fork operating at 4.2 K. A silicon tip from a commercial cantilever was attached to one prong of the tuning fork. With a metallic coating, a potential could…
An increasing number of experiments require the use of ultrasensitive nanomechanical resonators. Relevant examples are the investigation of quantum effects in mechanical systems [1] or the detection of exceedingly small forces as in…
We demonstrate a scanning force microscope, based upon a quartz tuning fork, that operates below 100 mK and in magnetic fields up to 6 T. The microscope has a conducting tip for electrical probing of nanostructures of interest, and it…
Interatomic-force measurements are regularly performed using frequency-modulation atomic force microscopy. This requires conversion of the observed shift in the resonant frequency of a force-sensing cantilever, to the actual force…
We demonstrate a superconducting inductive technique to measure the displacement of a micromechanical resonator. In our scheme, a type I superconducting microsphere is attached to the free end of a microcantilever and approached to the loop…
We report on the design and performance of a cryogenic (300 mK) near-field scanning microwave microscope. It uses a microwave resonator as the near-field sensor, operating at a frequency of 6 GHz and microwave probing amplitudes down to 100…
Nanomechanical resonator-based sensing devices are used in medical diagnostics based on their high-frequency dynamic behavior. Cantilevers fall into the category of Nanomechanical resonators. It also resembles a resonator whose shape is…
The purpose of this paper is to apply characteristics of residual stress that causes cantilever beams to bend for manufacturing a micro-structured gas flow sensor. This study uses a silicon wafer deposited silicon nitride layers,…
The extensive research and development of micromechanical resonators is trying to allow the use of these devices for highly sensitive applications. Microcantilevers are some of the simplest MEMS structure and had been proved to be a good…