相关论文: Compact inductor-capacitor resonators at sub-gigah…
We have designed and fabricated superconducting coplanar waveguide resonators with fundamental frequencies from 2 to $9 \rm{GHz}$ and loaded quality factors ranging from a few hundreds to a several hundred thousands reached at temperatures…
We describe the fabrication and measurement of microwave coplanar waveguide resonators with internal quality factors above 10 million at high microwave powers and over 1 million at low powers, with the best low power results approaching 2…
We demonstrate a simple and versatile resonator design based on a short strip of a typical coplanar waveguide shorted at one end to the ground and shunted at the other end with a large parallel-plate capacitor. Due to the shape of the…
Metallic coplanar microwave resonators are widely employed at room temperature, but their low-temperature performance has received little attention so far. We characterize compact copper coplanar resonators with multiple modes from 2.5 to…
We designed and successfully fabricated an absorption-type of superconducting coplanar waveguide (CPW) resonators. The resonators are made from a Niobium film (about 160 nm thick) on a high-resistance Si substrate, and each resonator is…
This work focuses on the development of planar microwave resonators which are to be used in electron spin resonance spectroscopic studies. Two half wavelength microstrip resonators of different geometrical shapes, namely straight ribbon and…
We have fabricated superconducting microwave resonators in a lumped element geometry using single crystal silicon dielectric parallel plate capacitors with C >2 pF. Aluminum devices with resonant frequencies between 4.0 and 6.5 GHz…
In this work, we study the development of a coplanar waveguide (CPW) resonator and its use in an electron spin resonance (ESR) spectrometer. The CPW resonator is designed to operate in S-band. It has a short circuit configuration which…
The loss in superconducting microwave resonators at low-photon number and low temperatures is not well understood but has implications for achievable coherence times in superconducting qubits. We have fabricated single-layer resonators with…
We address the scaling-up problem for superconducting quantum circuits by using lumped-element resonators based on an alternative fabrication method of aluminum -- aluminum oxide -- aluminum ($\mathrm{Al/AlO_x/Al}$) parallel-plate…
Alternative designs to an electric-LC (ELC) resonator, which is a type of metamaterial inclusion, are presented in this article. Fitting the resonator with an interdigital capacitor (IDC) helps to increase the total capacitance of the…
We have studied superconducting coplanar-waveguide (CPW) resonators fabricated from disordered (granular) films of Aluminum. Very high kinetic inductance of these films, inherent to disordered materials, allows us to implement ultra-short…
Microelectromechanical system (MEMS) based on-chip resonators offer great potential for sensing and high frequency signal processing applications due to their exceptional features like small size, large frequency-quality factor product,…
Millimeter-wave superconducting resonators are a useful tool for studying quantum device coherence in a new frequency domain. However, improving resonators is difficult without a robust and reliable method for coupling millimeter-wave…
Very small electromechanical coupling coefficient in micro-electromechanical systems (MEMS) or acoustic resonators is quite of a concern for oscillator performance, specially at mmWave frequencies. This small coefficient is the…
A High-Q microwave (K band) MEMS resonator is presented, which empolys substrate integrated waveguide (SIW) and micromachined via-hole arrays by ICP process. Nonradiation dielectric waveguide (NRD) is formed by metal filled via-hole arrays…
We describe the design and characterization of superconducting coplanar waveguide cavities tailored to facilitate strong coupling between superconducting quantum circuits and single trapped Rydberg atoms. For initial superconductor-atom…
We present an experimental investigation of lumped-element superconducting LC resonators designed to provide different types of coupling to a transmission line. We have designed four resonator geometries including dipole and quadrupole…
Low-frequency superconducting lumped-element resonators have recently attracted significant attention in the context of axion dark matter searches. Here we present the design and implementation of a fixed-frequency superconducting resonator…
A simple and fast process for micro-electromechanical (MEM) resonators with deep sub-micron transduction gaps in thin SOI is presented in this paper. Thin SOI wafers are important for advanced CMOS technology and thus are evaluated as…