相关论文: Thermoelastic Damping in MEMS Gyroscopes at High F…

Silicon-MEMS gyroscope is an important part of MEMS (Micro Electrical Mechanical System). There are some disturb ignored in traditional gyroscope that must be evaluated newly because of its smaller size (reach the level of micron). In these…

The dynamic behavior of a capacitive micro-electro-mechanical (MEMS) accelerometer is evaluated by using a theoretical approach which makes use of a squeeze film damping (SFD) model and ideal gas approach. The study investigates the…

The importance of thermoelastic damping as a fundamental dissipation mechanism for small-scale mechanical resonators is evaluated in light of recent efforts to design high-Q micrometer- and nanometer-scale electro-mechanical systems (MEMS…

This paper presents a detailed noise analysis and a noise-based optimization procedure for resonant MEMS structures. A design for high sensitivity of MEMS structures needs to take into account the noise shaping induced by damping phenomena…

Active thermal control is crucial in achieving the required accuracy and throughput in many industrial applications, e.g., in the medical industry, high-power lighting industry, and semiconductor industry. Thermoelectric Modules (TEMs) can…

The requirements pertaining to the reliability and accuracy of micro-electromechanical gyroscopic sensors are increasing,as systems for vehicle localization emerge as an enabling factor for autonomous driving. Since micro-electromechanical…

Our paper presents a non-destructive thermal transient measurement method that is able to reveal differences even in the micron size range of MEMS structures. Devices of the same design can have differences in their sacrificial layers as…

Microelectromechanical systems (MEMS) gyroscopes are widely used in consumer and automotive applications. They have to fulfill a vast number of product requirements which lead to complex mechanical designs of the resonating structure.…

Low mechanical loss materials are needed to further decrease thermal noise in upcoming gravitational wave detectors. We present an analysis of the contribution of Akhieser and thermoelastic damping on the experimental results of resonant…

Understanding microstructural evolution under extreme thermal conditions is essential for advancing metal additive manufacturing (AM). This work demonstrates the feasibility of employing micro-electro-mechanical system (MEMS) heating…

Quantitative thermoelectric measurements in the mesoscopic regime require accurate knowledge of temperature, thermovoltage, and device energy scales. We consider the effect of a finite load resistance on thermovoltage measurements of…

Mechanical resonances are used in a wide variety of devices; from smart phone accelerometers to computer clocks and from wireless communication filters to atomic force microscope sensors. Frequency stability, a critical performance metric,…

In recent decades, microelectromechanical systems (MEMS)-based gyroscopes have been employed to meet positioning and navigation demands of a plethora of commercially available devices. Most of such gyroscopes rely on electrostatic actuators…

The displacement noise in the test mass mirrors of interferometric gravitational wave detectors is proportional to their elastic dissipation at the observation frequencies. In this paper, we analyze one fundamental source of dissipation in…

We present mechanical measurements performed at low temperatures on cantilever-based microelectro-mechanicalstructures(MEMS) coated with a metallic layer. Two very different coatings are presented in order to illustrate the capabilities of…

This review presents an overview of the thermal properties of mesoscopic structures. The discussion is based on the concept of electron energy distribution, and, in particular, on controlling and probing it. The temperature of an electron…

Viscoelasticity plays a key role in many practical applications and in different reasearch fields, such as in seals, sliding-rolling contacts and crack propagation. In all these contexts, a proper knowledge of the viscoelastic modulus is…

The aim of this paper is to deal with multi-physics simulation of micro-electro-mechanical systems (MEMS) based on an advanced numerical methodology. MEMS are very small devices in which electric as well as mechanical and fluid phenomena…

Scanning tunneling microscopy (STM) and micro-electromechanical systems (MEMS) have traditionally addressed vastly different length scales - one resolving atoms, the other engineering macroscopic motion. Here we unite these two fields to…

Gyroscopes are crucial for accurate angular velocity measurements in navigation, stabilization, and control systems. MEMS gyroscopes offer advantages like compact size and low cost but suffer from errors and inaccuracies that are complex…