相关论文: Experimental Evaluation of Vibration Influence on …

A MEMS Duffing resonator is driven by two adjacent frequency tones into the nonlinear regime. We show that if the two-tone drive is applied at a frequency where a bistable response of the nonlinear oscillator exists, then the system output…

Optical levitation of mechanical oscillators has been suggested as a promising way to decouple the environmental noise and increase the mechanical quality factor. Here, we investigate the dynamics of a free-standing mirror acting as the top…

Scanning tunneling microscopy (STM) and micro-electromechanical systems (MEMS) have traditionally addressed vastly different length scales - one resolving atoms, the other engineering macroscopic motion. Here we unite these two fields to…

We present design, fabrication and characterization of a MEMS VCSEL which utilizes a silicon-on-insulator wafer for the microelectromechanical system and encapsulates the MEMS by direct InP wafer bonding, which improves the protection and…

Nowadays microfabrication techniques originating from micro-electronics enable to create mechanical objects of micron-size. The field of Micro-Electro-Mechanical devices (MEMS) is continuously expanding, with an amazingly broad range of…

We present a proof-of-concept LIDAR design that allows adaptive real-time measurements according to dynamically specified measurement patterns. We describe our optical setup and calibration, which enables fast sparse depth measurements…

This paper aims at mathematically modeling a new multi-physics conductivity imaging system incorporating mechanical vibrations simultaneously applied to an imaging object together with current injections. We perturb the internal…

Space-based stellar coronagraph instruments aim to directly image exoplanets that are a fraction of an arcsecond separation and ten billion times fainter than their host star. To achieve this, one or more deformable mirrors (DMs) are used…

Micro scanning mirrors (MSM) extend the range and field of view of LiDARs, medical imaging devices, and laser projectors. However, a new class of soft-hinged MSMs contains out-of-plane translation in addition to the 2 degree-of-freedom…

We measure the motional fluctuations of a micromechanical mirror using a Michelson interferometer, and demonstrate its interferometric stability. The position stability of the micromirror is dominated by the thermal mechanical noise of the…

A tilted spinning mirror rapidly steers the line of sight of the electron Bernstein wave (EBW) emission radiometer at the Mega Amp Spherical Tokamak (MAST). In order to resist high mechanical stresses at rotation speeds of up to 12,000 rpm…

In current research, laser Doppler vibrometer (LDV) as a new diagnostic tool is utilized for non-destructive testing of the automotive equipment. LDV technique is working based on measurement of the Doppler shift of a moving object in an…

This paper demonstrates a cryogenic deformable mirror (DM) with 1,020 actuators based on micro-electrical mechanical systems (MEMS) technology. Cryogenic space-borne infrared telescopes can experience a wavefront error due to a figure error…

Silicon-MEMS gyroscope is an important part of MEMS (Micro Electrical Mechanical System). There are some disturb ignored in traditional gyroscope that must be evaluated newly because of its smaller size (reach the level of micron). In these…

High-frequency micrometrical vibrations have been shown to greatly influence the adhesive performance of soft interfaces, however a detailed comparison between theoretical predictions and experimental results is still missing. Here, the…

Micro-electro-mechanical system (MEMS) microphones (mics) with two acoustic ports are currently receiving considerable interest, with the promise of achieving higher directional sensitivity compared to traditional one-port architectures.…

Recent advances in ground-based astronomy have made it possible to create optical telescopes with primary mirrors up to 40 m in size. With growing mirror diameter, the suppression of non-atmospheric disturbances becomes increasingly…

An excitation method for MEMS devices with planar electrodes is described. The stationary part of the device (the stator) consists of three electrode arrays arranged in the 'ABCABC' order. 'A', 'B', and 'C' carry time-independent potentials…

An analog crystal filter based cavity emulator is modified with reverse biased varactor diodes to provide a tuning range of around 160 Hz. The piezo drive voltage of the resonance controller is used to detune the cavity through the bias…

In this paper, we report the advantage of using AC actuating signal for driving MEMS actuators instead of DC voltages. The study is based upon micro mirror devices used in digital mode for optical switching operation. When the pull-in…