相关论文: Fabrication and characterization of aluminum SQUID…
We develop a two-dimensional (2D) Superconducting Quantum Interference Filter (SQIF) array based on recently introduced high-linearity tri-junction bi-SQUIDs. Our bi-SQUID SQIF array design is based on a tight integration of individual bi-…
We present a dry surface treatment combining atomic layer etching and deposition (ALE and ALD) to mitigate dielectric loss in fully fabricated superconducting quantum devices formed from aluminum thin films on silicon. The treatment,…
SQUID arrays are promising candidates for low profile antennas and low noise amplifier applications. We present the integrated circuit designs and results of DC and RF measurements of the wideband serial arrays based on integration of…
The development of large-scale quantum processors benefits from superconducting qubits that can operate at elevated temperatures and be fabricated with scalable, foundry-compatible processes. Atomic layer deposition (ALD) is increasingly…
Designing a thin film structure often begins with choosing a film deposition method that employs a specific primary process by which chemical species are formed and transported. In other words, a film deposition system in which two…
Atomic Layer Deposition (ALD) is a promising technique for growing ultrathin, pristine dielectrics on metal substrates, which is essential to many electronic devices. Tunnel junctions are an excellent example which require a leak-free,…
We demonstrate a highly linear superconducting quantum interference device (SQUID) amplifier based on a double-loop (Bi-SQUID) architecture incorporating three superconductor-normal metal-superconductor (S-N-S) junctions. Fabricated using…
We have studied a Superconducting Quantum Interference SQUID device made from a single layer thin film of superconducting silicon. The superconducting layer is obtained by heavily doping a silicon wafer with boron atoms using the Gas…
In our previous publication, we discussed the optical properties of multi-layered nanocomposite samples consisting of 300 pairs of an AlOx layer and a Cu layer produced from sputtering atomic layer augmented deposition (SALAD). These…
This work demonstrates a large area process for atomically thin 2D semiconductors to unlock the technological upscale required for their commercial uptake. The new atomic layer deposition (ALD) and conversion technique yields large area…
Electronic devices exploiting acoustic vibrations are ubiquitous in classical and quantum technologies. Central to these devices is the transducer, which enables the exchange of signals between electrical and acoustic networks. Among the…
We have designed and demonstrated a Superconducting Quantum Interference Device (SQUID) array linearized with cryogenic feedback. To achieve the necessary loop gain a 300 element series array SQUID is constructed from three monolithic…
We report on an extensive structural and electrical characterization of under-gate dielectric oxide insulators Al2O3 and HfO2 grown by Atomic Layer Deposition (ALD). We elaborate the ALD growth window for these oxides, finding that the…
We report on growth of high-aspect-ratio ($\gtrsim300$) zinc sulfide nanotubes with variable, precisely tunable, wall thicknesses and tube diameters into highly ordered pores of anodic alumina templates by atomic layer deposition (ALD) at…
Aluminum nitride (AlN) has emerged as a leading platform for integrated photonics in the visible and ultraviolet spectral ranges, particularly for quantum information applications involving trapped atoms. However, achieving low propagation…
This paper presents surface acoustic wave (SAW) acoustic delay lines (ADL) for studying propagation loss mechanisms in Lithium Niobate (LN). Devices were fabricated by depositing 50 nm aluminum patterns on 600 nm X-Cut LN on amorphous…
A minimal method to fabricate Al/AlO$_x$/Al Josephson junctions (JJs) using photolithography and argon etching, before metallization and oxidation, is demonstrated. JJs with areas ranging from 1 to 6 $\mu$m$^2$ can be fabricated and, with…
We have developed and measured a high-gain quantum-limited microwave parametric amplifier based on a superconducting lumped LC resonator with the inductor L including an array of 8 superconducting quantum interference devices (SQUIDs). This…
Atomic layer deposition (ALD), a layer-by-layer controlled method to synthesize ultrathin materials, provides various merits over other techniques such as precise thickness control, large area scalability and excellent conformality. Here we…
Complex integrated circuits require multiple wiring layers. In complementary metal-oxide-semiconductor (CMOS) processing, these layers are robustly separated by amorphous dielectrics. These dielectrics would dominate energy loss in…