相关论文: Improving the Resolution and Throughput of Achroma…
Structuring Si in arrays of vertical high aspect ratio pillars, ranging from nanoscale to macroscale feature dimensions, is essential for producing functional interfaces for many applications. Arrays of silicon 3D nanostructures are needed…
We detail on a continuous colloidal pattern replication by using contact photolithography. Chrome on quartz masks are fabricated using colloidal nanosphere lithography and subsequently used as photolithography stamps. Hexagonal pattern…
In this work, we show the feasibility of extreme ultraviolet (EUV) patterning on an HF-treated Si(100) surface in the absence of a photoresist. EUV lithography is the leading lithography technique in semiconductor manufacturing due to its…
Gratings enable dispersive spectroscopy from the X-ray to the optical, and feature prominently in proposed flagships and SmallSats alike. The exacting performance requirements of these future missions necessitate assessing whether the…
Terahertz subwavelength imaging aims at developing THz microscopes able to resolve deeply subwavelength features. To improve the spatial resolution beyond the diffraction limit, a current trend is to use various subwavelength probes to…
Compton telescopes provide a good sensitivity over a wide field of view in the difficult energy range running from a few hundred keV to several MeV. Their angular resolution is, however, poor and strongly energy dependent. We present a…
We explore possibilities of waveguide-mode interference lithography (WMIL) technique for high contrast subwavelength structures in the visible region. Selecting an appropriate waveguide-mode, we demonstrate high contrast resist mask…
Grid based binary holography (GBH) is an attractive method for patterning with light or matter waves. It is an approximate technique in which different holographic masks can be used to produce similar patterns. Here we present an optimal…
Diffractive optical elements such as periodic gratings are fundamental devices in X-ray imaging - a technique that medical, material science and security scans rely upon. Fabrication of such structures with high aspect ratios at the…
Nanoimprint lithography (NIL) is a widely used high-throughput fabrication technique for photonic devices, yet its reliability is often compromised by the inevitable imperfections that arise during the demolding process. Topological…
The nanoscale control afforded by scanning probe microscopes has prompted the development of a wide variety of scanning probe-based patterning methods. Some of these methods have demonstrated a high degree of robustness and patterning…
Using the illuminator for high numerical aperture (NA) extreme ultraviolet (EUV) exposure tool in EUV lithography can lead to support volume production of sub-2 nm logic nodes and leading-edge DRAM nodes. However, the typical design method…
Ptychography in a reflection geometry shows great promise for non-destructive imaging of 3-dimensional nanostructures at the surface of a thick substrate. A major challenge to obtain high quality reflection-ptychographic images under…
The Talbot effect describes the emergence of periodic patterns in perturbed propagating wave fields. The effect is well studied for perturbations from structurally coherent optics such as diffraction gratings. The emergence of freeform and…
Imaging through complex scattering media is severely limited by aberrations and scattering which obscure images and reduce resolution. Confocal and temporal gatings partly filter out multiple scattering but are severely degraded by…
The proposed black-hole finder mission EXIST will consist of multiple wide-field hard X-ray coded-aperture telescopes. The high science goals set for the mission require innovations in telescope design. In particular, wide energy band…
An ideal imaging system provides a spatial resolution that is ultimately dictated by the numerical aperture (NA) of the illumination and collection optics. In biological tissue, resolution is further affected by scattering limiting the…
Volumetric lithography offers a path to scalable fabrication of complex three-dimensional (3D) micro- and nanoscale architectures, yet existing approaches are limited by quasi-two-dimensional exposure physics or slow serial writing. We…
Colloidal lithography [1] is how patterns are reproduced in a variety of natural systems and is used more and more as an efficient fabrication tool in bio-, opto-, and nano-technology. Nanoparticles in the colloid are made to form a mask on…
We are proposing a new spectrograph (ATLAS) which would revolutionise intermediate-dispersion observations at the AAT. Based on the new technology of Volume Phase Holographic gratings, and using transmission optics, ATLAS offers high…