相关论文: Silicon formation in bulk silica through femtoseco…

Controlled formation of porous silicon has been of primary importance for numerous landmark applications such as light emitting sources, sensors, actuators, drug delivery systems, and energy storage applications. Frequently explored methods…

Silicon is an excellent material for microelectronics and integrated photonics with untapped potential for mid-IR optics. Despite broad recognition of the importance of the third dimension, current lithography methods do not allow…

We describe a technique for surface and sub-surface micro-machining of glass substrates using tightly focused femtosecond laser pulses at a wavelength of 1660 nm. Although silicate glass is normally transparent at this wavelength, the…

Femtosecond laser modification of fused silica enables precise surface tailoring for the fabrication of micro-optical components such as microlenses and diffractive elements. However, the process is governed by laser-matter interactions…

Silicon carbide (SiC) is the leading wide-bandgap semiconductor material, providing mature doping and device fabrication. Additionally, SiC hosts a multitude of optically active point defects (color centers) and is relevant for many…

Visible luminescence is observed from the composite of SiO2 with embedded silicon nanocrystallites produced by femtosecond laser irradiation of hydrogenated amorphous silicon (a-Si:H) film in air. The photoluminescence originates from the…

Tightly focused femtosecond laser-beam in the non-ablative regime can induce a shock-wave enough to reach locally pressures in the giga-Pascal range or more. In a single beam configuration, the location of the highest-pressure zone is…

We present a versatile, large-scale fabrication method for nanostructured semiconducting junctions. Silicon substrates were processed by femtosecond laser pulses in methanol and a quasi-ordered distribution of columnar nanospikes was formed…

This letter is the first demonstration of material modification using tightly focused femtosecond laser vortex beams. Double-charge femtosecond vortices were synthesized with the polarization-singularity beam converter described in Ref [1]…

Silicon (Si) is one of the most abundant elements on Earth, and it is the most important and widely used semiconductor, constituting the basis of modern electronic devices. Despite extensive study, some properties of Si remain elusive. For…

Ultrafast lasers create extreme, non-equilibrium thermodynamic conditions that can transiently reach pressures and temperatures comparable to interior core of the earth. Here we show that femtosecond excitation of amorphous silica-hafnia…

The absorbed laser energy of a femtosecond laser pulse in a transparent material induces a warm dense matter region which relaxation may lead to structural modifications in the surrounding cold matter. The modeling of the…

This letter is the first demonstration of material modification using tightly focused femtosecond laser vortex beams. Double-charge femtosecond vortices were synthesized with the polarization-singularity beam converter described in Ref [1]…

We describe a micro-fabrication method to create concave features with ultra-low surface roughness in silica, either on the end facets of optical fibers or on flat substrates. The machining uses a single focused CO2 laser pulse. Parameters…

Humanity's interest in manufacturing silica-glass objects extends back over three thousand years. Silica glass is resistant to heating and exposure to many chemicals, and it is transparent in a wide wavelength range. Due to these qualities,…

We report three-dimensional laser microfabrication, which enables microstructuring of materials on the scale of 0.2-1 micrometers. The two different types of microfabrication demonstrated and discussed in this work are based on holographic…

We report on the fabrication of three-dimensional (3D) high-Q whispering gallery microcavities on a fused silica chip by femtosecond laser microfabriction, enabled by the 3D nature of femtosecond laser direct writing. The processing mainly…

Laser-induced plasma formation and subsequent relaxation in solid dielectrics is the precursor to structural modifications that are accompanied by a permanent alteration of material properties. The decay of the electron-hole plasma through…

The formation and the interaction of multiple cavities, induced by tightly focused femtosecond laser pulses, are studied by using a developed numerical tool, including the thermo-elasto-plastic material response. Simulations are performed…

Silicon has dominated the microelectronics industry for the last 50 years. With its zero nuclear spin isotope (28Si) and low spin orbit coupling, it is believed that silicon can become an excellent host material for an entirely new…