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We demonstrate the feasibility of fabricating light-waveguiding microstructures in bulk single-crystal diamond by means of direct ion implantation with a scanning microbeam, resulting in the modulation of the refractive index of the…

光学 · 物理学 2016-08-29 S. Lagomarsino , P. Olivero , F. Bosia , M. Vannoni , S. Calusi , L. Giuntini , M. Massi

The creation of nitrogen-vacancy centres in diamond is nowadays well controlled using nitrogen implantation and annealing. Although the high-resolution placement of NV centres has been demonstrated using either collimation through pierced…

Recent efforts to define microscopic solid-immersion-lenses (SIL) by focused ion beam milling into diamond substrates that are registered to a preselected single photon emitter are summarized. We show how we determine the position of a…

This paper reports on the fabrication and characterization of a high purity monocrystalline diamond detector with buried electrodes realized by the selective damage induced by a focused 6 MeV carbon ion beam scanned over a pattern defined…

仪器与探测器 · 物理学 2016-08-30 P. Olivero , J. Forneris , M. Jaksic , Z. Pastuovic , F. Picollo , N. Skukan , E. Vittone

The Nitrogen Vacancy color center (NV-) in diamond is of great interest for novel photonic applications. Diamond nano-photonic structures are often implemented using Focused-Ion-Beam (FIB) processing, leaving a damaged surface which has a…

In the present work we report about a parallel-processing ion beam fabrication technique whereby high-density sub-superficial graphitic microstructures can be created in diamond. Ion beam implantation is an effective tool for the structural…

Direct-write processes enable the alteration or deposition of materials in a continuous, directable, sequential fashion. In this work we demonstrate an electron beam direct-write process in an aberration-corrected scanning transmission…

材料科学 · 物理学 2023-03-22 Ondrej Dyck , Andrew R. Lupini , Stephen Jesse

We report on mask-less, high resolution etching of diamond surfaces, featuring sizes down to 10 nm. We use a scanning electron microscope (SEM) together with water vapor, which was injected by a needle directly onto the sample surface.…

应用物理 · 物理学 2019-09-04 Vasilis Dergianlis , Martin Geller , Dennis Oing , Nicolas Woehrl , Axel Lorke

The formation of single-crystal diamond membranes is an important prerequisite for the fabrication of high-quality optical cavities in this material. Diamond membranes fabricated using lift-off processes involving the creation of a damaged…

Focused ion beam milling allows manipulation of the shape and size of nanostructures to create geometries potentially useful for opto-electronics, thermoelectrics, and quantum computing. We focus on using the ion beam to control the…

材料科学 · 物理学 2017-10-20 Sarah Friedensen , Jerome T. Mlack , Marija Drndić

Diamond has recently attracted considerable attention as a promising platform for quantum technologies, photonics and high resolution sensing applications. Here we demonstrate a chemical approach that enables the fabrication of functional…

材料科学 · 物理学 2014-05-26 Aiden A. Martin , Milos Toth , Igor Aharonovich

A nanofabrication process for realizing optical nanoantennas carved from a single-crystal gold plate is presented in this communication. The method relies on synthesizing two-dimensional micron-size gold crystals followed by the dry etching…

Diamond provides superior optical and mechanical material properties, making it a prime candidate for the realization of integrated optomechanical circuits. Because diamond sub- strates have matured in size, efficient nanostructuring…

We report on the systematic characterization of conductive micro-channels fabricated in single-crystal diamond with direct ion microbeam writing. Focused high-energy (~MeV) helium ions are employed to selectively convert diamond with…

材料科学 · 物理学 2014-05-06 F. Picollo , D. Gatto Monticone , P. Olivero , B. A. Fairchild , S. Rubanov , S. Prawer , E. Vittone

In this paper, the controlled production of high quality metal-free diamond nanoparticles is demonstrated. Milling with tempered steel is shown to leave behind iron oxide contamination which is difficult to remove. Milling with SiN…

Scanning diamond nitrogen-vacancy probe microscopy (SNVM) is an important tool for studying nanoscale condensed-matter phenomena. Ga$^+$-ion-focused-ion-beam (FIB) milling has been introduced as an available method for fabricating SNVM,…

材料科学 · 物理学 2026-01-13 Dwi Prananto , Yifei Wang , Yuta Kainuma , Kunitaka Hayashi , Masahiko Tomitori , Toshu An

Focused ion beam (FIB) has been used as an effective tool for precise nanoscale fabrication. It has recently been employed to tailor defect engineering in functional nanomaterials such as two-dimensional transition metal dichalcogenides…

Micro-fabrication in diamond is involved in a wide set of emerging technologies, exploiting the exceptional characteristics of diamond for application in bio-physics, photonics, radiation detection. Micro ion-beam irradiation and pulsed…

Split-vacancy color centers in diamond are promising solid state platforms for the implementation of photonic quantum technologies. These luminescent defects are commonly fabricated upon low energy ion implantation and subsequent thermal…

Many promising applications of single crystal diamond and its color centers as sensor platform and in photonics require free-standing membranes with a thickness ranging from several micrometers to the few 100 nm range. In this work, we…

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