相关论文: Self-limiting excitation of MEMS devices with surf…
Electrostatic actuators are simple but important switching devices for MEMS applications. Due to the difficulties associated with the electrostatic nonlinearity, precise mathematical description is often hard to obtain for the dynamics of…
In this paper we present an electronic circuit for position or capacitance estimation of MEMS electrostatic actuators based on a switched capacitor technique. The circuit uses a capacitive divider configuration composed by a fixed capacitor…
This research provides the theoretical feasibility study of a novel architecture of a MEMS differential resonant accelerometer, with switchable and tunable electrostatic transmission between the proof mass and the vibrating sensing beams.…
The requirements pertaining to the reliability and accuracy of micro-electromechanical gyroscopic sensors are increasing,as systems for vehicle localization emerge as an enabling factor for autonomous driving. Since micro-electromechanical…
A stationary free boundary problem modeling a three-dimensional electrostatic MEMS device is investigated. The device is made of a rigid ground plate and an elastic top plate which is hinged at its boundary, the plates being held at…
Autonomous oscillators, such as clocks and lasers, produce periodic signals \emph{without} any external frequency reference. In order to sustain stable periodic motions, there needs to be external energy supply as well as nonlinearity built…
A variational approach is employed to find stationary solutions to a free boundary problem modeling an idealized electrostatically actuated MEMS device made of an elastic plate coated with a thin dielectric film and suspended above a rigid…
Nonlinear dynamics of a two-side electro-statically actuated capacitive micro-beam is studied. The piezoelectric actuation leads to the generation of an axial force along the length of the micro-beam and this is used as a tuning tool to…
We investigate the dynamics of a microelectromechanical (MEMS) self-sustained oscillator supporting multiple resonating and interacting modes. In particular, the interaction of the first four flexural modes along with the first torsional…
A parabolic free boundary problem modeling a three-dimensional electrostatic MEMS device is investigated. The device is made of a rigid ground plate and an elastic top plate which is hinged at its boundary, the plates being held at…
An idealized electrostatically actuated microelectromechanical system (MEMS) involving an elastic plate with a heterogeneous dielectric material is considered. Starting from the electrostatic and mechanical energies, the governing evolution…
The evolution problem for a membrane based model of an electrostatically actuated microelectromechanical system (MEMS) is studied. The model describes the dynamics of the membrane displacement and the electric potential. The latter is a…
Micro-Electro-Mechanical Systems (MEMS) normally have fixed or moving structures with cross-sections of the order of microns ($\mu m$) and lengths of the order of tens or hundreds of microns. These structures are often plates or array of…
Self excitation is a mechanism which is ubiquitous for electromechanical power devices such as electrical generators. This is conventionally achieved by making use of the magnetic field component in electrical generators [1], where a good…
The problem of resonant excitation of a harmonic oscillator the energy levels of which are slightly shifted under the action of a random potential is solved. It is shown that, in this case, there exists a threshold magnitude of the exciting…
Well-posedness of a free boundary problem for electrostatic microelectromechanical systems (MEMS) is investigated when nonlinear bending effects are taken into account. The model describes the evolution of the deflection of an electrically…
This paper demonstrates a vibration test for a resonant MEMS scanning system in operation to evaluate the vibration immunity for automotive lidar applications. The MEMS mirror has a reinforcement structure on the backside of the mirror,…
With an eye towards next-generation, smart, micro/nanofluidic devices, capable of responding to external stimuli or changes in environment, we demonstrate a means to achieve dynamic control of the spatio-temporal properties of the electric…
We report the observation of self-oscillations in a bottom-up nanoelectromechanical system (NEMS) during field emission driven by a constant applied voltage. An electromechanical model is explored that explains the phenomenon and that can…
Recent experiments performed in current-driven nano-contacts with strong perpendicular anisotropy have shown that spin-transfer torque can drive self-localized spin waves [1, 2] that above a certain threshold intensity can condense into a…