相关论文: Cavity piezooptomechanics: piezoelectrically excit…
Aluminum nitride (AlN) has been widely used in microeletromechanical resonators for its excellent electromechanical properties. Here we demonstrate the use of AlN as an optomechanical material that simultaneously offer low optical and…
This abstract presents an aluminum nitride (AlN) piezoelectric actuator for tuning optical resonance modes of silicon nitride photonic resonators. The AlN actuator is fabricated on top of a thick silicon dioxide cladding that encapsulates…
Schemes to achieve strong coupling between mechanical modes of aluminum nitride microstructures and microwave cavity modes due to the piezoelectric effect are proposed. We show that the strong coupling regime is feasible for an on-chip…
We present a cavity piezo-optomechanical system where microwave and optical degrees of freedom are coupled through an ultra-high frequency mechanical resonator. By utilizing the coherence among the three interacting modes, we demonstrate…
Optical guided wave dielectric structures with nanoscale slots are known to provide strong electric field enhancements in the slotted region, enabling strong light-matter interactions. Here we demonstrate an ultrahigh-Q slotted 2D photonic…
Cavity optomechanics enables active manipulation of mechanical resonators through backaction cooling and amplification. This ability to control mechanical motion with retarded optical forces has recently spurred a race towards realizing a…
In the field of quantum computation and communication there is a compelling need for quantum-coherent frequency conversion between microwave electronics and infra-red optics. A promising platform for this is an optomechanical crystal…
Silicon photonics has offered a versatile platform for the recent development of integrated optomechanical circuits. However, silicon is limited to wavelengths above 1100 nm and does not allow device operation in the visible spectrum range…
Nanomechanical resonators with exceptionally low dissipation are advancing mechanics-based sensors and quantum technologies. The key for these advances is the engineering of localized phononic modes that are well-isolated from the…
Using light to measure an object's motion is central to operating mechanical sensors that probe forces and fields. Cavity optomechanical systems embed mechanical resonators inside optical resonators. This enhances the sensitivity of…
In this work, we demonstrate the first single-crystal aluminum nitride (AlN) wafer-based thickness-extensional (TE) mode bulk acoustic resonator for piezoelectric power conversion. The device exhibits a high series resonance 3-dB quality…
On-chip actuation and readout of mechanical motion is key to characterize mechanical resonators and exploit them for new applications. We capacitively couple a silicon nitride membrane to an off resonant radio-frequency cavity formed by a…
This work presents a new acoustic MEMS resonator technology, dubbed Aluminum Nitride (AlN) Combined Overtone Resonator (COR), capable of addressing the filter requirements for the 5G mmWave spectrum in the 6-40GHz range. The COR exploits…
Operation of nanomechanical devices in water environment has been challenging due to the strong viscous damping that greatly impedes the mechanical motion. Here we demonstrate an optomechanical micro-wheel resonator integrated in…
We demonstrate wideband integrated photonic circuits in sputter-deposited aluminum nitride (AlN) thin films. At both near-infrared and visible wavelengths, we achieve low propagation loss in integrated waveguides and realize high-quality…
We demonstrate optomechanically-mediated electromagnetically-induced transparency and wavelength conversion in silicon nitride (Si3N4) microdisk resonators. Fabricated devices support whispering gallery optical modes with a quality factor…
We propose a scheme that is able to generate the microwave controlled optical double optome-chanical induced transparency (OMIT) in a hybrid piezo-optomechanical cavity system, which a piezoelectric optomechanical crystal AlN-nanobeam…
The interaction of optical and mechanical modes in nanoscale optomechanical systems has been widely studied for applications ranging from sensing to quantum information science. Here, we develop a platform for cavity optomechanical circuits…
The inherently nonlinear interaction between light and motion in cavity optomechanical systems has experimentally been studied in a linearized description in all except highly driven cases. Here we demonstrate a nanoscale optomechanical…
High-\Qm{} mechanical resonators are crucial for applications where low noise and long coherence time are required, as mirror suspensions, quantum cavity optomechanical devices, or nanomechanical sensors. Tensile strain in the material…