相关论文: Laser micro-fabrication of concave, low-roughness …

We present the fabrication of exceptionally small-radius concave microoptics on fused silica substrates using CO2 laser ablation and subsequent reactive ion etching. The protocol yields on-axis near-Gaussian depressions with radius of…

We present a high-yield method for fabricating concave micromirror templates in silica using feedback-controlled CO2 laser ablation with precise in situ positioning. Real-time monitoring of the white-light emission generated during ablation…

Direct laser writing of surface waveguides with ultrashort pulses is a crucial achievement towards all-laser manufacturing of photonic integrated circuits sensitive to their environment. In this Letter, few-cycle laser pulses (with a sub-10…

Short (40-200 microseconds) single focused CO2 laser pulses of energy of about 100 microJ were used to fabricate high quality concave micromirror templates on silica and fluoride glass. The ablated features have diameters of 20-100 microns…

We describe a technique for surface and sub-surface micro-machining of glass substrates using tightly focused femtosecond laser pulses at a wavelength of 1660 nm. Although silicate glass is normally transparent at this wavelength, the…

We report on fabricating high-fill-factor plano-convex spherical and square micro-lens arrays on fused silica glass surface using CO2 laser assisted reshaping technique. Initially, periodic micro-pillars have been encoded on the glass…

3D printing of high-quality silica photonic structures is particularly challenging, as surface roughness at the nanoscale can severely degrade optical performance through scattering losses. Here, we develop a technique to fold ultrasmooth…

Optical resonators are increasingly important tools in science and technology. Their applications range from laser physics, atomic clocks, molecular spectroscopy, and single-photon generation to the detection, trapping and cooling of atoms…

Sub-picosecond optical laser processing of metals is actively utilized for modification of a heated surface layer. But for deeper modification of different materials a laser in the hard x-ray range is required. Here, we demonstrate that a…

Miniature concave hollows, made by wet etching silicon through a circular mask, can be used as mirror substrates for building optical micro-cavities on a chip. In this paper we investigate how ICP polishing improves both shape and roughness…

Concave pyramids are created in the (100) surface of a silicon wafer by anisotropic etching in potassium hydroxide. High quality micro-mirrors are then formed by sputtering gold onto the smooth silicon (111) faces of the pyramids. These…

Microscale additive manufacturing of reflective copper is becoming increasingly important for microelectronics and microcomputers, due to its excellent electrical and thermal conductivity. Yet, it remains challenging for state-of-the-art…

We report the realization of a spatial and spectrally tunable air-gap Fabry-Perot type microcavity of high finesse and cubic-wavelength-scale mode volume. These properties are attractive in the fields of opto-mechanics, quantum sensing and…

Fabry-Perot cavities are essential tools for applications like precision metrology, optomechanics and quantum technologies. A major challenge is the creation of microscopic spherical mirror structures which allow the precise matching with…

We present a novel method of machining optical fiber surfaces with a CO${}_2$ laser for use in Fiber-based Fabry-Perot Cavities (FFPCs). Previously FFPCs were prone to large birefringence and limited to relatively short cavity lengths…

Non-linear absorption phenomena induced by controlled irradiation with a femtosecond laser beam can be used to tailor materials properties within the bulk of substrates. One of the most successful applications of this technique is the…

We demonstrate laser-written concave hemispherical structures produced on the endfacets of optical fibers that serve as mirror substrates for tunable open-access microcavities. We achieve finesse values of up to 250, and a mostly constant…

We report on the fabrication of three-dimensional (3D) high-Q whispering gallery microcavities on a fused silica chip by femtosecond laser microfabriction, enabled by the 3D nature of femtosecond laser direct writing. The processing mainly…

Humanity's interest in manufacturing silica-glass objects extends back over three thousand years. Silica glass is resistant to heating and exposure to many chemicals, and it is transparent in a wide wavelength range. Due to these qualities,…

Sub-micro structured surfaces allow modifying the behavior of polymer films or components. Especially in micro fluidics a lotus-like characteristic is requested for many applications. Structure details with a high aspect ratio are necessary…