相关论文: Finite Element Modelling of Micro-cantilevers Used…
The extensive research and development of micromechanical resonators is trying to allow the use of these devices for highly sensitive applications. Microcantilevers are some of the simplest MEMS structure and had been proved to be a good…
The torsional vibration of atomic force microscope (AFM) cantilevers is critical for high-sensitivity measurements, yet existing models for width-varying cantilevers often rely on approximations that lead to significant discrepancies with…
Nanomechanical resonator-based sensing devices are used in medical diagnostics based on their high-frequency dynamic behavior. Cantilevers fall into the category of Nanomechanical resonators. It also resembles a resonator whose shape is…
We measure the mechanical thermal noise of soft silicon atomic force microscopy cantilevers. Using an interferometric setup, we have a resolution down to 1E-14 m/rtHz on a wide spectral range (3 Hz to 1E5 Hz). The low frequency behavior…
High-frequency atomic force microscopy has enabled extraordinary new science through large bandwidth, high speed measurements of atomic and molecular structures. However, traditional optical detection schemes restrict the dimensions, and…
The functionalization of an Atomic Force Microscope (AFM) cantilever with a colloidal bead is a widely used technique when the geometry between the probe and the sample must be controlled, particularly in force spectroscopy. But some…
We report on the design, fabrication, and implementation of ultrasensitive micromechanical oscillators. Our ultrathin single-crystal silicon cantilevers with integrated magnetic structures are the first of their kind: They are fabricated…
Dynamic-mode atomic force microscopy (AFM) in liquid remains complicated due to the strong viscous damping of the cantilever resonance. Here we show that a high-quality resonance (Q>20) can be achieved in aqueous solution by attaching a…
We report on progress in developing compact sensors for atomic force microscopy (AFM), in which the mechanical transducer is integrated with near-field optical readout on a single chip. The motion of a nanoscale, doubly-clamped cantilever…
In optical detection setups to measure the deflection of micro-cantilevers, part of the sensing light is absorbed, heating the mechanical probe. We present experimental evidences of a frequency shift of the resonant modes of a cantilever…
When heated, micro-resonators present a shift of their resonance frequencies. We study specifically silicon cantilevers heated locally by laser absorption, and evaluate theoretically and experimentally their temperature profile and its…
Microelectromechanical system (MEMS) based on-chip resonators offer great potential for high frequency signal processing circuits like reference oscillators and filters. This is due to their exceptional features like small size, large…
In this work we introduce a new method of a ferromagnetic resonance (FMR) detection from thin, nm-size, films. Our setup is based on the commercial piezo-cantilever, used for atomic force microscopy. It has an option to rotate the sample in…
Atomic force spectroscopy and microscopy (AFM) are invaluable tools to characterize nanostructures and biological systems. Most experiments, including state-of-the-art images of molecular bonds, are achieved by driving probes at their…
Aligning a microcantilever to an area of interest on a sample is a critical step in many scanning probe microscopy experiments, particularly those carried out on devices and rare, precious samples. We report a series of protocols that…
Eigen frequency is one of the most important system responses to be considered while designing a micro-scale piezoelectric cantilever beam. This paper investigates and analyzes the effect of dimension parameters of a micro-scale…
The dynamic behavior of AFM is studied taking into account the nonlinear interaction forces between probe and sample. The exerted forces on the free end of micro-beam are simulated with the third degree polynomial. The effect of some…
We describe a transducer for low-temperature atomic force microscopy based on electromechanical coupling due to a strain-dependent kinetic inductance of a superconducting nanowire. The force sensor is a bending triangular plate (cantilever)…
In this work is presented a microbalance for single microparticle sensing based on resonating AFM cantilever. The variation of the resonator eigenfrequency is related to the particle mass positioned at the free apex of the cantilever. An…
This paper investigates the performance of the micro-electro-mechanical systems resonant sensor used for particle detection and concentration measurement. These fine and ultra-fine particles such as particulate matter (PM), ferrous…