机电换能的高速控制：用于优化MEMS微镜阶跃与稳定响应的先进驱动技术
仪器与探测器
2016-09-20 v3 光学
摘要
微/纳机电系统(MEMS/NEMS)为工程师提供了一套应对广泛技术挑战的强大解决方案。然而，由于它们是机械系统，响应时间可能成为限制。在某些情况下，先进的工程驱动技术可将响应时间提高多达一千倍，显著拓宽MEMS/NEMS解决方案的应用空间。
引用
@article{arxiv.1512.05297,
title = {High speed control of electro-mechanical transduction Advanced Drive Techniques for Optimized Step-and-Settle Response of MEMS Micromirrors},
author = {Matthias Imboden and Jackson Chang and Corey Pollock and Evan Lowell and Mehmet Akbulut and Jessica Morrison and Thomas Stark and Thomas G. Bifano and David J. Bishop},
journal= {arXiv preprint arXiv:1512.05297},
year = {2016}
}
备注
37 pages, 20 figures