基于透明导电热器的高耐久、低损耗 Sb2Se3 光开关集成在硅氮化物上
光学
2026-04-14 v1
摘要
我们报道了一种基于相变材料(Sb2Se3)的电气致动、低损耗非易失光开关,其集成在硅氮化物(Si3N4)平台上。该器件采用 8 英寸晶圆级流程制造,表明了面向光子集成电路(PIC)可扩展制造的可行性。通过采用透明铅锡氧化物(ITO)微型加热器,实现了非易失态之间的可逆开关,其消光比达 25~dB，耐久性超过 1.4 亿次开关循环,为非易失集成光子存储和可重构架构树立了新基准。此外,通过调节电脉冲宽度,可可重复实现超 6 位的多级操作,实现对光相位的精确控制。这些结果突出了该平台在高密度可编程和非易失光子集成系统方面的可扩展性和能效优势。
引用
@article{arxiv.2604.11649,
title = {High-Endurance, Low-loss Sb2Se3 Optical Switches on Silicon Nitride using Transparent Conductive Heaters},
author = {Xingshi Yu and Ipsita Chakraborty and Isaac Johnson and Savvas I. Raptis and Qianbin Luo and Thalia Dominguez Bucio and Elliot Sandell and Chris Vagionas and Ioannis Zeimpekis and Amalia Miliou and Nikos Pleros and Frederic Gardes},
journal= {arXiv preprint arXiv:2604.11649},
year = {2026}
}
备注
12 pages, 5 figures. Submitted to Nature Photonics. Demonstrates a scalable non-volatile phase-change photonic switch with wafer-scale fabrication, high endurance (>10^8 cycles), and multi-level (over 6 bit) programmability