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An exponential increase in the performance of silicon microelectronics and the demand to manufacture in great volumes has created an ecosystem that requires increasingly complex tools to fabricate and characterize the next generation of…
While silicon photonics has leveraged the nanofabrication tools and techniques from the microelectronics industry, it has also inherited the metrological methods from the same. Photonics fabrication is inherently different from…
Perturbations to the effective refractive index from nanometer-scale fabrication variations in waveguide geometry plague high index-contrast photonic platforms including the ubiquitous sub-micron silicon-on-insulator (SOI) process. Such…
When measuring quadratic values representative of random fluctuations, such as the thermal noise of Atomic Force Microscopy (AFM) cantilevers, the background measurement noise cannot be averaged to zero. We present a signal processing…
A comparison of experimentally observed Raman scattering data with Raman line-shapes, generated theoretically using phonon confinement model, has been carried out to understand the sensitivity of different Raman spectral parameters on…
The complex system of the CMS all-silicon Tracker, with 15\,148 silicon strip and 1440 silicon pixel modules, requires sophisticated alignment procedures. In order to achieve an optimal track-parameter resolution, the position and…
A MEMS based tribometer has been developed that can be read out with nanometer and nano-Newton resolution, approaching the resolution and sensitivity of a friction force microscope (FFM). It can be used to study friction of MEMS device…
A high-precision silicon microstrip detector assembly methodology based on a gantry system is presented in this paper. The proposed approach has been applied to the mass production of all flight-model detector modules for the L0 tracking…
Nanoscale forces play an important role in different scanning probe microscopies, most notably atomic force microscopy (AFM). In contrast, in scanning near-field optical microscopy (SNOM) a light-induced coupled local optical polarization…
The Advanced Camera for Surveys on-board HST is equipped with a set of one grism and three prisms for low-resolution, slitless spectroscopy in the range 1150 Ang. to 10500 Ang. The G800L grism provides optical spectroscopy between 5500 Ang.…
We report a new technique of scanning capacitance microscopy at microwave frequencies. A near field scanning microwave microscope probe is kept at a constant height of about 1nm above the samplewith the help of Scanning Tunneling Microscope…
Monolithic CMOS pixel sensors offer unprecedented opportunities for fast nano-imaging through direct electron detection in transmission electron microscopy. We present the design and a full characterisation of a CMOS pixel test structure…
An analysis software was developed for the high aspect ratio optical scanning system in the Detec- tor Laboratory of the University of Helsinki and the Helsinki Institute of Physics. The system is used e.g. in the quality assurance of the…
In this paper, a definition of the gain and added noise of impedance matching networks for scanning microwave microscopy is given. This definition can be used to compare different impedance matching techniques independently of the…
A new technique for the fabrication of highly sensitive qPlus sensor for atomic force microscopy (AFM) is described. Focused ion beam was used to cut then weld onto a bare quartz tuning fork a sharp micro-tip from an electrochemically…
In this article, we present a deflection measurement setup for Atomic Force Microscopy (AFM). It is based on a quadrature phase differential interferometer: we measure the optical path difference between a laser beam reflecting above the…
Operation of an X-ray spectrometer based on a spherical variable line spacing grating is analyzed using dedicated ray-tracing software allowing fast optimization of the grating parameters and spectrometer geometry. The analysis is…
Atomic force spectroscopy and microscopy (AFM) are invaluable tools to characterize nanostructures and biological systems. Most experiments, including state-of-the-art images of molecular bonds, are achieved by driving probes at their…
The coherence of quantum dot qubits fabricated in semiconductors is often limited by charge noise from defects in gate dielectrics, which are material- and process-dependent. Characterizing these defects is an important step towards…
The detection and the quantification of anomalies in image data are critical tasks in industrial scenes such as detecting micro scratches on product. In recent years, due to the difficulty of defining anomalies and the limit of correcting…