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We propose an iterative scheme for feature-based positioning using a new weighted dissimilarity measure with the goal of reducing the impact of large errors among the measured or modeled features. The weights are computed from the…
To improve transistor density and electronic performance, next-generation semiconductor devices are adopting three-dimensional architectures and feature sizes down to the few-nm regime, which require atomic-scale metrology to identify and…
Traceability of precision instrument and measuring method is the core issue in metrology science. In the field of nanometer length measurement, the laser interferometers are usually used to trace the measurement value to the laser…
A new approach was proposed to accurately determine the thickness of film, especially for ultra-thin film, through spectrum fitting with the assistance of interference layer. The determination limit can reach even less than 1 nm. Its…
Good geometrical calibration is essential in the use of high resolution detectors. The individual sensors in the detector have to be calibrated with an accuracy better than the intrinsic resolution, which typically is of the order of 10 um.…
Some applications in scientific imaging, like space-based high-precision photometry, benefit from a detailed characterization of the sensitivity variation within a pixel. A detailed map of the intra-pixel sensitivity (IPS) allows to…
The Scanning electron microscope (SEM) and Electron-Dispersive Spectroscope (EDS) are two highly effective instruments in the field of nanoscience and nanotechnology. The quality of these instruments is determined by various factors, with…
The scanning electron microscope (SEM) produces an image of a sample by scanning it with a focused beam of electrons. The electrons interact with the atoms in the sample, which emit secondary electrons that contain information about the…
Further improvements are made to the non-linear data analysis algorithm for the atomic force microscope [P. Attard, arXiv:1212.3019v2 (2012)]. The algorithm is required when there is curvature in the compliance region due to photo-diode…
A modified phonon confinement model considering the size distribution, an improved phonon dispersion curve and a confinement function is developed for the calculation of size dependent Raman spectra of the silicon (Si) nanocrystals. The…
Using coherent x-ray scattering, we evidenced atomic step roughness at the [111] vicinal surface of a silicon monocrystal of 0.05 degree miscut. Close to the (1/2 1/2 1/2) anti-Bragg position of the reciprocal space which is particularly…
Atomic Force Microscopy (AFM) allows to probe matter at atomic scale by measuring the perturbation of a nanomechanical oscillator induced by near-field interaction forces. The quest to improve sensitivity and resolution of AFM has forced…
In this paper, an automatic calibration algorithm is proposed to reduce the depth error caused by internal stray light in amplitude-modulated continuous wave (AMCW) coaxial scanning light detection and ranging (LiDAR). Assuming that the…
This paper introduces a device, algorithm and graphical user interface to obtain anthropometric measurements of foot. Presented device facilitates obtaining scale of image and image processing by taking one image from side foot and…
Phase steps are an important type of wavefront aberrations generated by large telescopes with segmented mirrors. In a closed-loop correction cycle these phase steps have to be measured with the highest possible precision using natural…
Optical fibers play a key role in many different fields of science and technology. In particular, fibers with a diameter of several micrometers are intensively used in photonics. For these applications, it is often important to precisely…
The functionalization of an Atomic Force Microscope (AFM) cantilever with a colloidal bead is a widely used technique when the geometry between the probe and the sample must be controlled, particularly in force spectroscopy. But some…
Diffraction gratings with high upward diffraction efficiency and large effective length are required for chip-scale light detection and ranging. In this paper, we propose a diffraction grating based on a multilayer silicon nitride…
In the present work we show that the correct determination of surface morphology using Scanning Force Microscopy (SFM) imaging and Power Spectral Density (PSD) analysis of the surface roughness is an extremely demanding task that is easily…
Scientific Complementary Metal Oxide Semiconductor (sCMOS) sensors are finding increasingly more applications in astronomical observations, thanks to their advantages over charge-coupled devices (CCDs) such as a higher readout frame rate,…