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SOI (Silicon-On-Insulator) pixel sensor is promising technology for developing the high position resolution detector by integrating the small pixels and circuits in the monolithic way. The event driven (trigger mode) SOI based pixel sensor…

In this paper, we describe the development of monolithic pixel detectors by using a Silicon-on-Insulator (SOI) technology for X-ray and charged particle applications. The detectors are based on a 0.2 {\mu}m CMOS fully depleted SOI process…

Instrumentation and Detectors · Physics 2019-11-14 S. Mitsui , Y. Arai , T. Miyoshi , A. Takeda

A low noise and wide dynamic range event driven detector for the detection of X-Ray energy is realized using 0.2 [um] Silicon on insulator (SOI) technology. Pixel circuits are divided into two parts; signal sensing circuit and event…

Instrumentation and Detectors · Physics 2015-07-27 Sumeet Shrestha , Hiroki Kamehama , Shoji Kawahito , Keita Yasutomi , Keiichiro Kagawa , Ayaki Takeda , Takeshi Go Tsuru , Yasuo Arai

We present the development status of the SOIKID, a detector combining the SOI pixel detector and the superconducting detector KID (Kinetic Inductance Detector). The aim of the SOIKID is to measure X-ray photon energy with the resolution…

Instrumentation and Detectors · Physics 2015-07-07 Hirokazu Ishino , Atsuko Kibayashi , Yosuke Kida , Yousuke Yamada

The Silicon-On-Insulator PIXel (SOIPIX) detector is a unique monolithic structure imaging device currently being by the SOIPIX group, led by the High Energy Accelerator Research Organization (KEK). Our detector team at the KEK Photon…

We have been developing the X-ray silicon-on-insulator (SOI) pixel sensor called XRPIX for future astrophysical satellites. XRPIX is a monolithic active pixel sensor consisting of a high-resistivity Si sensor, thin SiO$_2$ insulator, and…

Instrumentation and Methods for Astrophysics · Physics 2020-01-29 K. Hagino , K. Negishi , K. Oono , K. Yarita , T. Kohmura , T. G. Tsuru , T. Tanaka , S. Harada , K. Kayama , H. Matsumura , K. Mori , A. Takeda , Y. Nishioka , M. Yukumoto , K. Fukuda , T. Hida , Y. Arai , I. Kurachi , S. Kishimoto

This paper presents the design of a new monolithic Silicon-On-Insulator pixel sensor in $200~nm$ SOI CMOS technology. The main application of the proposed pixel detector is the spectroscopy, but it can also be used for the minimum ionizing…

Instrumentation and Detectors · Physics 2015-07-06 Szymon Bugiel , Roma Dasgupta , Sebastian Glab , Marek Idzik , Jakub Moron , Piotr Julian Kapusta , Wojciech Kucewicz , Michal Turala

This paper presents the results of the characterisation of a back-illuminated pixel sensor manufactured in Silicon-On-Insulator technology on a high-resistivity substrate with soft X-rays. The sensor is thinned and a thin Phosphor layer…

Instrumentation and Detectors · Physics 2015-06-03 Marco Battaglia , Dario Bisello , Richard Celestre , Devis Contarato , Peter Denes , Serena Mattiazzo , Craig Tindall

A monolithic pixel sensor in deep-submicron Silicon-On-Insulator (SOI) CMOS technology has been designed, manufactured and characterised. This technology is of significant interest for applications in particle tracking and imaging. The…

Instrumentation and Detectors · Physics 2008-07-02 Marco Battaglia , Dario Bisello , Devis Contarato , Peter Denes , Piero Giubilato , Lindsay E. Glesener , Serena Mattiazzo , Chinh Vu

We are now developing new X-ray imaging system by using Silicon-On-Insulator (SOI) Pixel Detectors. The SOI detector is a monolithic radiation imaging detector based on a 0.2um FD-SOI CMOS process. Special additional process steps are also…

Instrumentation and Detectors · Physics 2021-07-28 Ryutaro Nishimura , Yasuo Arai , Toshinobu Miyoshi , Keiichi Hirano , Shunji Kishimoto , Ryo Hashimoto

A silicon pixel detector with fine pitch size of 19x19 um, developed base on SOI (silicon on insulator) technology, was tested under the illumination of infrared laser pulses. As an alternative way to particle beam tests, the laser pulses…

Instrumentation and Detectors · Physics 2016-08-03 Yi Liu , Yunpeng Lu , Xudong Ju , Qun Ouyang

We have been developing event-driven SOI Pixel Detectors, named `XRPIX' (X-Ray soiPIXel) based on the silicon-on-insulator (SOI) pixel technology, for the future X-ray astronomical satellite with wide band coverage from 0.5 keV to 40 keV.…

The silicon-on-insulator pixel (SOIPIX) detector is a unique monolithic-structure imaging device currently being developed by the SOIPIX group led by the High Energy Accelerator Research Organization (KEK). The detector team at KEK Photon…

Instrumentation and Detectors · Physics 2025-10-30 Ryutaro Nishimura , Noriyuki Igarashi , Daisuke Wakabayashi , Yuki Shibazaki , Yoshio Suzuki , Keiichi Hirano , Yasuo Arai

The implementation of optomechanical devices in silicon-on-insulator (SOI), the canonical silicon photonics technology is seriously hampered by the strong phonon leakage into the silica under-cladding. This limitation has been partially…

We are developing DAQ for Si-pixel detectors by using a Slicon-On-Insulator (SOI) technology. This DAQ consists of firmware works on SEABAS (Soi EvAluation BoArd with Sitcp) DAQ board and software works on PC. We have been working on the…

Instrumentation and Detectors · Physics 2015-07-20 Ryutaro Nishimura , Yasuo Arai , Toshinobu Miyoshi

We are developing monolithic pixel sensors based on a 0.2 $\mu$m fully-depleted Silicon-on-Insulator (SOI) technology for HEP experiment applications. The total ionizing dose (TID) effect is the major issue in the applications for hard…

Instrumentation and Detectors · Physics 2016-09-21 Mari Asano , Kazuhiko Hara , Daisuke Sekigawa , Shunsuke Honda , Naoshi Tobita , Yasuo Arai , Toshinobu Miyoshi , Ikuo Kurachi

This paper presents the results of the characterisation of a pixel sensor manufactured in OKI 0.2 micron SOI technology integrated on a high-resistivity substrate, and featuring several pixel cell layouts for charge collection optimisation.…

Instrumentation and Detectors · Physics 2011-10-19 Marco Battaglia , Dario Bisello , Devis Contarato , Peter Denes , Piero Giubilato , Serena Mattiazzo , Devis Pantano , Sarah Zalusky

We have been developing monolithic active pixel sensors, X-ray Astronomy SOI pixel sensors, XRPIXs, based on a Silicon-On-Insulator (SOI) CMOS technology as soft X-ray sensors for a future Japanese mission, FORCE (Focusing On Relativistic…

To measure light emission pattern in scintillator, higher sensitivity and faster response are required to photo detector. Such as single photon avalanche diode (SPAD), conventional pixelated photo detector is operated at Geiger avalanche…

Monolithic pixel sensors for charged particle detection and imaging applications have been designed and fabricated using commercially available, deep-submicron Silicon-On-Insulator (SOI) processes, which insulate a thin layer of integrated…

Instrumentation and Detectors · Physics 2009-05-08 Marco Battaglia , Dario Bisello , Devis Contarato , Peter Denes , Piero Giubilato , Lindsay Glesener , Serena Mattiazzo , Chinh Qu Vu
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