Related papers: Microelectromechanical system cantilever-based fre…
A High-Q microwave (K band) MEMS resonator is presented, which empolys substrate integrated waveguide (SIW) and micromachined via-hole arrays by ICP process. Nonradiation dielectric waveguide (NRD) is formed by metal filled via-hole arrays…
Compact, low-power analog RF components are essential for next-generation microwave electronics and wireless systems. We demonstrate an all-electric integrated piezo-magnonic microelectromechanical system that enables efficient voltage…
We present design, fabrication and characterization of a MEMS VCSEL which utilizes a silicon-on-insulator wafer for the microelectromechanical system and encapsulates the MEMS by direct InP wafer bonding, which improves the protection and…
In Micro-electro-mechanical Systems (MEMS) based pressure sensors and acoustic devices, deflection of a membrane is utilized for pressure or sound measurements. Due to advantages of capacitive pressure sensor over piezoresistive pressure…
Magnetic sensing is present in our everyday interactions with consumer electronics, and also demonstrates potential for measurement of extremely weak biomagnetic fields, such as those of the heart and brain. In this work, we leverage the…
Varifocal lenses, conventionally implemented by changing the axial distance between multiple optical elements, have a wide range of applications in imaging and optical beam scanning. The use of conventional bulky refractive elements makes…
We present simulations of the dynamic and temperature dependent behavior of Micro-Electro-Mechanical Systems (MEMS) by utilizing recently developed parallel codes which enable a coupling of length scales. The novel techniques used in this…
We fabricate a microscale electromechanical system, in which a suspended superconducting membrane, treated as a mechanical oscillator, capacitively couples to a superconducting microwave resonator. As the microwave driving power increases,…
We propose the design of a reconfigurable impedance matching network for the lower RF frequency band, based on a developed RF-MEMS technology. The circuit is composed of RF-MEMS ohmic relays, metal-insulator-metal (MIM) capacitors and…
We demonstrate a new optomechanical device system which allows highly efficient transduction of femtogram nanobeam resonators. Doubly clamped nanomechanical resonators with mass as small as 25 fg are embedded in a high-finesse…
Dispersive mode coupling is a promising mechanism for the development of advanced micro/nanoelectromechanical devices. However, strong coupling strength remains a key challenge limiting the practical applications of dispersive mode coupling…
Nanoelectromechanical systems, or NEMS, are MEMS scaled to submicron dimensions. In this size regime, it is possible to attain extremely high fundamental frequencies while simultaneously preserving very high mechanical responsivity (small…
Optimizing sensor readout schemes and integrated circuit designs for both open-loop and closed-loop implementations requires precise modeling and simulation strategies. This study introduces a novel two-port impedance model to estimate the…
An experimentally-calibrated carbon nanotube compact transistor model has been used here to design two high-frequency (HF) circuits with two different functionalities each: a phase configurable amplifier (PCA) and a frequency configurable…
We present a theoretical and experimental study of superconducting ring resonators as an initial step toward their implementation in superconducting electronics and quantum technologies, with promising applications including superconducting…
Single-chip CMOS-based biosensors that feature microcantilevers as transducer elements are presented. The cantilevers are functionalized for the capturing of specific analytes, e.g., proteins or DNA. The binding of the analyte changes the…
We report in this paper the design, fabrication and experimental characterization of a piezoelectric MEMS microgenerator. This device scavenges the energy of ambient mechanical vibrations characterized by frequencies in the range of 1 kHz.…
A dual-excitation method for resonant-frequency tracking in scanning probe microscopy based on amplitude detection is developed. This method allows the cantilever to be operated at or near resonance for techniques where standard phase…
Compact inductor-capacitor (LC) resonators, in contrast to coplanar waveguide (CPW) resonators, have a simple lumped-element circuit representation but usually call for sophisticated finite-element method (FEM) simulations for an accurate…
Inspired by recent graded metamaterials designs, we create phononic arrays of micro-resonators for frequency signal amplification and wave filtering. Leveraging suspended waveguides on a thick silicon substrate, we hybridize surface…