Related papers: Microelectromechanical system cantilever-based fre…
We investigate the dynamics of mechanical resonators subject to excitations comprising of an oscillating or harmonic part, whose amplitude decays exponentially in time. We call these complex frequency excitations and show that the resulting…
Microelectromechanical systems (MEMS) have been applied to many measurement problems in physics, chemistry, biology and medicine. In parallel, cavity optomechanical systems have achieved quantum-limited displacement sensitivity and ground…
A variety of scientific fields like proteomics and spintronics have created a new demand for on-chip devices capable of sensing parameters localized within a few tens of micrometers. Nano and microelectromechanical systems (NEMS/MEMS) are…
We describe a transducer for low-temperature atomic force microscopy based on electromechanical coupling due to a strain-dependent kinetic inductance of a superconducting nanowire. The force sensor is a bending triangular plate (cantilever)…
This paper shows the effect of scaling silicon accelerometers down from MEMS to NEMS. It models both electronics and Brownian noise sources for both capacitive and resonant devices, and computes the minimum detectable signal attainable.…
We report on experiments performed on a cantilever-based tri-port nano-electro-mechanical (NEMS) device. Two ports are used for actuation and detection through the magnetomotive scheme, while the third port is a capacitively coupled gate…
This paper presents the experimental demonstration of a dual-input/dual-output reflective impedance metasurface. The design of the metasurface relies on the Method of Moments and leverages auxiliary surface waves to achieve anomalous…
Spatiotemporal metasurfaces, characterized by dynamic variations in both space and time, enable functionalities unattainable with passive metasurfaces. In this study, we propose a novel concept of parametric metasurfaces capable of…
This paper discusses a logical operation of multi-memories that consist of coupled nonlinear micro-electro-mechanical systems (MEMS) resonators. A MEMS resonator shows two coexisting stable states when nonlinear responses appear. Previous…
Fabrication processes involving anhydrous hydrofluoric vapor etching are developed to create high-$Q$ aluminum superconducting microwave resonators on free-standing silicon membranes formed from a silicon-on-insulator wafer. Using this…
Nanomechanical systems offer a versatile platform for both fundamental science and industrial applications. Resonating vibration has been demonstrated to enable an ultrasensitive detection of various physical quantities, with emerging…
Coupled superconducting transmission line resonators have applications in quantum information processing and fundamental quantum mechanics. A particular example is the realization of fast beam splitters, which however is hampered by…
An opto--electro--mechanical system formed by a nanomembrane capacitively coupled to an LC resonator and to an optical interferometer has been recently employed for the high--sensitive optical readout of radio frequency (RF) signals [T.…
We report on the design, fabrication, and implementation of ultrasensitive micromechanical oscillators. Our ultrathin single-crystal silicon cantilevers with integrated magnetic structures are the first of their kind: They are fabricated…
We experimentally demonstrate a simple micro-electro-mechnical systems (MEMS) approach to acoustic metamaterials and have observed the average increase of nearly 6 dB beyond the classic law for sound attenuation at low frequencies from 200…
A sensor that integrates high sensitivity micro-Hall effect magnetometry and high-frequency electron paramagnetic resonance spectroscopy capabilities on a single semiconductor chip is presented. The Hall-effect magnetometer was fabricated…
A MEMS Duffing resonator is driven by two adjacent frequency tones into the nonlinear regime. We show that if the two-tone drive is applied at a frequency where a bistable response of the nonlinear oscillator exists, then the system output…
Nonlinear micro-electro-mechanical systems (MEMS) resonators open new opportunities in sensing and signal manipulation compared to their linear counterparts by enabling frequency tuning and increased bandwidth. Here, we design, fabricate…
We study electro-mechanical entanglement in a system where a massive membrane is capacitively coupled to a {\it low frequency} LC resonator. In opto- and electro-mechanics, the entanglement between a megahertz (MHz) mechanical resonator and…
We report on the development and demonstration of a MHz frequency domain multiplexing (FDM) technology to read out arrays of cryogenic transition edge sensor (TES) X-ray microcalorimeters. In our FDM scheme, TESs are AC-biased at different…