Related papers: A Microcantilever-based Gas Flow Sensor for Flow R…
We present a simple theoretical framework to describe the thermal noise of a microscopic mechanical beam in a viscous fluid: we use the Sader approach to describe the effect of the surrounding fluid (added mass and viscous drag), and the…
An extremely sensitive temperature measurement MEMS device is developed based on the principle of structural deflection in a bi-material cantilever caused by a difference in thermal expansion coefficients. A dual-beam asymmetrical geometry…
We present a scanning probe technique for measuring the dynamics of individual fluxoid transitions in multiply connected superconducting structures. In these measurements, a small magnetic particle attached to the tip of a silicon…
Ac electrokinetic flows are commonly used for manipulating micron-scale particles in a biosensor system. At the solid-liquid state there are two kinds of processes in the reaction between analytes and ligands: the mass transport process and…
Properties of typical MEMS materials have been widely investigated. Mechanical properties of MEMS structures depend not only on the bulk material properties, but also structural factors. A measurement system has been made to measure…
Micro-electro mechanical systems (MEMS) thermal flow sensors are increasingly used for compact, low-power flow monitoring in biomedical applications. However, silicon-based method for sensor fabrication is limited by high cost, rigidity,…
This research article presents stress distribution and fracture analysis of a cantilever beam considering both continuum and lumped distribution of gravity force. Airy stress function is used to derive two-dimensional stress distribution…
We report on an optimized micro-machined thermal flow-rate sensor as part of an autonomous multi-parameter sensing device for water network monitoring. The sensor has been optimized under the following constraints: low power consumption and…
We report a gas flow driven voltage generation of Octyltrichlorosilane (OTS) molecules self assembled on silicon wafers (Si wafers). OTS Self assembled Monolayer (SAM) has been coated on both p-type and n-type doped silicon wafers (p-Si and…
Nanomechanical resonator-based sensing devices are used in medical diagnostics based on their high-frequency dynamic behavior. Cantilevers fall into the category of Nanomechanical resonators. It also resembles a resonator whose shape is…
In Vapor Cycle Systems, the mass flow sensor playsa key role for different monitoring and control purposes. However,physical sensors can be inaccurate, heavy, cumbersome, expensive orhighly sensitive to vibrations, which is especially…
Optical beam deflection is a popular method to measure the deformation of micromechanical devices. As it measures mostly a local slope, its sensitivity depends on the location and size of the optical spot. We present a method to evaluate…
Active microelectromechanical systems can couple the nanomechanical domain with the electronic domain by integrating electronic sensing and actuation mechanisms into the micromechanical device. This enables very fast and sensitive…
A micro-pressure sensor with an isosceles trapezoidal beam-membrane (ITBM) is proposed in this paper, consisting of a square silicon membrane, four isosceles trapezoidal beams and four piezoresistors.To investigate how the elastic silicon…
Sensitive transduction of the motion of a microscale cantilever is central to many applications in mass, force, magnetic resonance, and displacement sensing. Reducing cantilever size to nanoscale dimensions can improve the bandwidth and…
Pneumatic pressure cells with thin metallic spherical diaphragm of shallow spherical shell configuration linked with vibrating wire pickup or vibrating cantilever pickup were reported in the past. In order to enhance the sensitivity of the…
The flexible capacitive pressure sensors are one of the most essential and famous devices with vast applications in automobile, aerospace, marine, healthcare, wearables, consumer, and portable electronics. The fabrication of pressure…
Mechanical stress control is becoming one of the major challenges for the future of micro and nanotechnologies. Micro scanning X-ray diffraction is one of the promising techniques that allows stress characterization in such complex…
Atomic force microscopy cantilevers are often, intentionally or not, heated at their extremity. We describe a model to compute the resulting temperature field in the cantilever and in the surrounding fluid on a wide temperature range. In…
This paper presents an apparatus to measure the flow of granular matter through a funnel with a force sensor. In addition to being easily reproducible, our proposed method enhances measurement accuracy from the popular method that uses a…