X-ray diffraction characterization of suspended structures for MEMS applications
Materials Science
2025-01-22 v1 Applied Physics
Classical Physics
Abstract
Mechanical stress control is becoming one of the major challenges for the future of micro and nanotechnologies. Micro scanning X-ray diffraction is one of the promising techniques that allows stress characterization in such complex structures at sub micron scales. Two types of MEMS structure have been studied: a bilayer cantilever composed of a gold film deposited on poly-silicon and a boron doped silicon bridge. X-ray diffraction results are discussed in view of numerical simulation experiments.
Cite
@article{arxiv.2501.10424,
title = {X-ray diffraction characterization of suspended structures for MEMS applications},
author = {P. Goudeau and N. Tamura and B. Lavelle and S. Rigo and T. Masri and A. Bosseboeuf and T. Sarnet and J. -A. Petit and J. -M. Desmarres},
journal= {arXiv preprint arXiv:2501.10424},
year = {2025}
}
Comments
Thin Films Stresses And Mechanical Properties, Mar 2005, San Francisco CA, United States