Related papers: Porous Alumina Based Capacitive MEMS RH Sensor
At the Department of Electron Devices a cheap, more or less CMOS process compatible capacitive type RH sensor has been developed. Capacitive sensors are based on dielectric property changes of thin films upon water vapour uptake which…
Humidity sensing is important to a variety of technologies and industries, ranging from environmental and industrial monitoring to medical applications. Although humidity sensors abound, few available solutions are thin, transparent,…
We present the design, fabrication, and response of a polymer-based Laterally Amplified Chemo-Mechanical (LACM) humidity sensor based on mechanical leveraging and parametric amplification. The device consists of a sense cantilever…
Real-time and accurate monitoring of humidity and pH is of great significance in daily life and industrial production. Existing humidity and pH measurement suffer from limitations such as low sensitivity, signal crosstalk, complex system…
Real-time measurement of relative humidity (RH) is important to many physical, chemical, and biological processes. However, in processes that involve harsh conditions such as high temperatures, strong electromagnetic interferences, and…
The paper discusses the importance and the issues of interfacing capacitive sensors. Two architectures applicable for interfacing capacitive sensors are presented. The first solution was designed to interface a capacitive humidity sensor…
Indoor humidity is a crucial factor affecting people's health and well-being. Wireless humidity sensing techniques are scalable and low-cost, making them a promising solution for measuring humidity in indoor environments without requiring…
We present the design, fabrication and response of humidity sensor based on electrical tunneling through temperature-stabilized nanometer gaps. The sensor consists of two stacked metal electrodes separated by 2.5 nm of vertical air gap.…
A break in traditional pore morphology approach, is presented here to see its niche merit over the conventional sensors for water vapour detection. Tubular pores were replaced with normal cone for trace- and inverse cone for RH- level…
We report a high performance relative humidity (RH) microsensor by coating a few-layer graphene oxide (GO) flake over a photonic crystal (PC) cavity. Since the GO layer has a high water-activity and interacts with the evanescent cavity mode…
We report on an optimized micro-machined thermal flow-rate sensor as part of an autonomous multi-parameter sensing device for water network monitoring. The sensor has been optimized under the following constraints: low power consumption and…
The p-type surface conductivity of H-terminated diamond (HD) has opened new path ways to develop diamond based electronic devices, photo-catalysts, chemical and bio-sensors. Herein, we report on the room temperature H2S detection behaviour…
Graphene oxide (GO)-based humidity sensors are attracting widespread attention due to their high responsivity and low cost. However, GO-based humidity sensors generally suffer from slow response and recovery as well as poor stability,etc.…
Wireless electromagnetic sensing is a passive, non-destructive technique for measuring physical and chemical changes through permittivity or conductivity changes. However, the readout is limited by the sensitivity of the materials, often…
Active microelectromechanical systems can couple the nanomechanical domain with the electronic domain by integrating electronic sensing and actuation mechanisms into the micromechanical device. This enables very fast and sensitive…
A novel chipless RFID humidity sensor based on a finite Artificial Impedance Surface (AIS) is presented. The unit cell of the AIS is composed of three concentric loops thus obtaining three deep and high Q nulls in the electromagnetic…
In the context of the studies of the ATLAS High Luminosity LHC programme, radiation tolerant pixel detectors in CMOS technologies are investigated. To evaluate the effects of substrate resistivity on CMOS sensor performance, the H35DEMO…
Magnetic sensing is present in our everyday interactions with consumer electronics, and also demonstrates potential for measurement of extremely weak biomagnetic fields, such as those of the heart and brain. In this work, we leverage the…
Heat flux sensors (HFS) have attracted significant interest for their potential in managing waste heat efficiently. A recently proposed HFS, that works on the basis of the anomalous Nernst effect (ANE), offers several advantages in its…
In this paper, a capacitive flexible tactile sensor was designed to measure the pressure of objects based on MEMS technology. This sensor is a structure of a 4x4 array, with metal Ag as the capacitive electrode, which forms the tactile…