Related papers: Porous Alumina Based Capacitive MEMS RH Sensor
A novel microfabricated, all-electrical measurement platform is presented for a direct, accurate and rapid determination of the thermal conductivity and diffusivity of liquid and solid materials. The measurement approach is based on the…
We have demonstrated atomically thin, quantum capacitance-limited, field-effect transistors (FETs) that enable the detection of pH changes with ~75-fold higher sensitivity (4.4 V/pH) over the Nernst value of 59 mV/pH at room temperature…
Low concentration hydrogen gas detection is of paramount importance both in space applications as well as medical applications. It is also critically important for safe handling of hydrogen below the explosive limit. Here, we report a novel…
In Micro-electro-mechanical Systems (MEMS) based pressure sensors and acoustic devices, deflection of a membrane is utilized for pressure or sound measurements. Due to advantages of capacitive pressure sensor over piezoresistive pressure…
This paper describes a temperature sensitivity or thermal sag measurement of a geometric anti-spring based micro-electromechanical system (MEMS) gravimeter (Wee-g). The Wee-g MEMS gravimeter is currently fabricated on a (100) silicon wafer…
The radiation hardness of passive CMOS pixel sensors fabricated in 150 nm LFoundry technology is investigated. CMOS process lines are especially of interest for large-scale silicon detectors as they offer high production throughput at…
Monolithic Active Pixel Sensors (MAPS) have been developed since the late 1990s employing silicon substrate with a thin epitaxial layer in which deposited charge is collected by disordered diffusion rather than by drift in an electric…
Flexible pressure sensors are an attractive area of research due to their potential applications in biomedical sensing and wearable devices. Among flexible and wearable pressure sensors, capacitive pressure sensors show significant…
This study has successfully demonstrated a novel self-heating formaldehyde gas sensor based on a thin film of NiO sensing layer. A new fabrication process has been developed in which the Pt micro heater and electrodes are deposited directly…
Hydrogen (H2) is a well-known reduction gas and for safety reasons is very important to be detected. The most common systems employed along its detection are metal oxide-based elements. However, the latter demand complex and expensive…
This paper presents a highly sensitive microwave sensor for dielectric sensing. One of the main disadvantages of microwave resonant-based sensors is cross-sensitivity originated by time-dependent uncontrolled environmental factors such as…
This study constructs a hybrid module with a multi-material collaborative detection architecture by integrating silicon pixel layers into the longitudinally segmented scintillating fiber sampling calorimeter module and optimizes the…
Pixel sensors using 8" CMOS processing technology have been designed and characterized offering the benefits of industrial sensor fabrication, including large wafers, high throughput and yield, as well as low cost. The pixel sensors are…
Next generation cosmic microwave background (CMB) polarimetry experiments aim to deploy order 500,000 detectors, requiring repeatable and reliable fabrication process with stable and uniform transition edge sensor (TES) bolometer…
Torsional oscillator (TO) is an experimental technique which is widely used to investigate superfluid responses in helium systems confined in porous materials or adsorbed on substrates. In these systems, heat capacity (HC) is also an…
The Transition Edge Sensor is extremely sensitive to the change of temperature, combined with the high-Z metal of a certain thickness, it can realize the high energy resolution measurement of particles such as X-rays. X-rays with energies…
We have described here the design and operation of an automated ac susceptibility set up using a closed cycle helium refrigerator. This set up is useful for measuring linear and nonlinear magnetic susceptibilities of various magnetic…
This work presents a novel hydrogen sensor based on 30% scandium-doped aluminum nitride (ScAlN) laterally vibrating resonators (LVRs) functionalized with a palladium (Pd) thin film. The micro-electro-mechanical system (MEMS) device operates…
Limited sensitivity and sensing range are arguably the greatest challenges in microwave sensor design. Recent attempts to improve these properties have relied on metamaterial- (MTM-) inspired open-loop resonators (OLRs) coupled to…
This paper presents investigated results of copper-oxide nanowires used as a humidity sensor. Copper-oxide nanowires films were grown over cross-comb type gold electrodes on a SiO2 substrate using thermal annealing technique, and its…