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Studying the dynamical behavior of micro- and nano-mechanical systems (MEMS and NEMS) is essential in various fields from nonlinear dynamics to quantum technologies. Hence, it is important to be able to precisely monitor the mechanical…
The need for wearable or abandoned microsystems, as well as the trend to a lower power consumption of electronic devices, make miniaturized renewable energy generators a viable alternative to batteries. Among the different alternatives, an…
Mechanical resonators are widely used as precision clocks and sensitive detectors that rely on the stability of their eigenfrequencies. The phase noise is determined by different factors ranging from thermal noise and frequency noise of the…
A High-Q microwave (K band) MEMS resonator is presented, which empolys substrate integrated waveguide (SIW) and micromachined via-hole arrays by ICP process. Nonradiation dielectric waveguide (NRD) is formed by metal filled via-hole arrays…
In RF (Radio Frequency) domain, one of the limitations of using MEMS (Micro Electromechanical Systems) switching devices for medium power applications is RF power. Failure phenomena appear even for 500 mW. A design of MEMS switched…
Using interplay between surface plasmons and metamaterials, we propose a new technique for novel metamaterial designs. We show that surface plasmons existing on thin metal surfaces can be used to "drive" non-resonant structures in their…
This paper deals with a single-crystal-silicon (SCS) MEMS resonator with improved temperature stability. While simulations have shown that the temperature coefficient of resonant frequency can be down to 1 ppm/degrees C, preliminary…
The coupling of micro- or nanomechanical resonators via a shared substrate is intensively exploited to built systems for fundamental studies and practical applications. So far, the focus has been on devices operating in the kHz regime with…
Resonant metasurfaces are devices composed of nanostructured sub-wavelength scatterers that generate narrow optical resonances, enabling applications in filtering, nonlinear optics, and molecular fingerprinting. It is highly desirable for…
Nanomechanical resonators, machined out of Silicon-on-Insulator wafers, are operated in the nonlinear regime to investigate higher-order mechanical mixing at radio frequencies, relevant to signal processing and nonlinear dynamics on…
We present simulations of the dynamic and temperature dependent behavior of Micro-Electro-Mechanical Systems (MEMS) by utilizing recently developed parallel codes which enable a coupling of length scales. The novel techniques used in this…
Microelectromechanical systems (MEMS) speakers are compact, scalable alternatives to traditional voice coil speakers, promising improved sound quality through precise semiconductor manufacturing. This review provides an overview of the…
The enormous stiffness and low density of graphene make it an ideal material for nanoelectromechanical (NEMS) applications. We demonstrate fabrication and electrical readout of monolayer graphene resonators, and test their response to…
The implementation of on-chip MEMS/NEMS transducers for arbitrary resonators is difficult due to a number of difficulties such as material choice, large dissipation, restriction in high frequency, low sensitivity, poor reliability, and poor…
Sensors and actuators based on resonant micro-electro-mechanical systems (MEMS), such as scanning micro mirrors, are well-established in automotive and consumer products. As the areas of application broaden, the requirements for the MEMS…
Fabrication processes involving anhydrous hydrofluoric vapor etching are developed to create high-$Q$ aluminum superconducting microwave resonators on free-standing silicon membranes formed from a silicon-on-insulator wafer. Using this…
(RFT) allows very high-Q active mode resonators, promising crystal-less monolithic clock generation for mmWave systems. However, there is a strong need for design of mmWave oscillators that utilize the high-Q of active-mode RFT (AM-RFT)…
In this paper, an architecture designed for electrical measurement of the quality factor of MEMS resonators is proposed. An estimation of the measurement performance is made using PSPICE simulations taking into account the component's…
Nanoelectromechanical systems, or NEMS, are MEMS scaled to submicron dimensions. In this size regime, it is possible to attain extremely high fundamental frequencies while simultaneously preserving very high mechanical responsivity (small…
Resonant scattering of electromagnetic (EM) waves by small particles is considered as one of the basic problem in metamaterial science. At present, special subwavelength resonators are considered as structural elements in chiral and…