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In this paper it is shown how the equivalent circuit parameters of a MEMS resonator can be simply obtained from an eigenfrequency simulation. Additionally, it is demonstrated that the Q-factor as a result of support losses in a MEMS…

Mesoscale and Nanoscale Physics · Physics 2013-05-01 P. G. Steeneken , J. J. M. Ruigrok , S. Kang , J. T. M. van Beek , J. Bontemps , J. J. Koning

Scanning tunneling microscopy (STM) and micro-electromechanical systems (MEMS) have traditionally addressed vastly different length scales - one resolving atoms, the other engineering macroscopic motion. Here we unite these two fields to…

Mesoscale and Nanoscale Physics · Physics 2026-01-09 R. J. G. Elbertse , M. Xu , A. Keşkekler , S. Otte , R. A. Norte

A variety of scientific fields like proteomics and spintronics have created a new demand for on-chip devices capable of sensing parameters localized within a few tens of micrometers. Nano and microelectromechanical systems (NEMS/MEMS) are…

Silicon ring resonator-based devices, such as modulators, detectors, filters, and switches, play important roles in integrated photonic circuits for optical communication, high-performance computing, and sensing applications. However, the…

Resonators based on two-dimensional (2D) materials have exceptional properties for application as nanomechanical sensors, which allows them to operate at high frequencies with high sensitivity. However, their performance as nanomechanical…

Mesoscale and Nanoscale Physics · Physics 2024-11-21 M. P. F. Wopereis , N. Bouman , S. Dutta , P. G. Steeneken , F. Alijani , G. J. Verbiest

Nanomechanical resonator-based sensing devices are used in medical diagnostics based on their high-frequency dynamic behavior. Cantilevers fall into the category of Nanomechanical resonators. It also resembles a resonator whose shape is…

Instrumentation and Detectors · Physics 2023-12-19 Abhay K. Rajak , Ritambhara Dash , Ashwini Kumari , A. S. Bhattacharyya

We report an actuation/detection scheme with a top-down nano-electromechanical system for frequency shift-based sensing applications with outstanding performance. It relies on electrostatic actuation and piezoresistive nanowire gauges for…

Microelectromechanical (MEMS) resonators are widely used in timekeeping applications, and recent advances in fabrication, materials, and encapsulation technology have advanced their potential as high stability frequency references. However,…

The smart integrated systems of tomorrow would demand a combination of micromechanical components and traditional electronics. On-chip solutions will be the ultimate goal. One way of making such systems is to implement the mechanical parts…

Other Computer Science · Computer Science 2008-02-22 O. Soeraasen , J. E. Ramstad

Magnetic sensing is present in our everyday interactions with consumer electronics, and also demonstrates potential for measurement of extremely weak biomagnetic fields, such as those of the heart and brain. In this work, we leverage the…

Applied Physics · Physics 2019-11-26 Josh Javor , Alexander Stange , Corey Pollock , Nicholas Fuhr , David J. Bishop

High quality micro- and nano-mechanical resonators are widely used in sensing, communications and timing, and have future applications in quantum technologies and fundamental studies of quantum physics. Crystalline thin-films are…

Recent advances in nanotechnology have led to the development of nano-electro-mechanical systems (NEMS) such as nanomechanical resonators, which have recently received significant attention from the scientific community. This has not only…

Mesoscale and Nanoscale Physics · Physics 2011-05-11 Kilho Eom , Harold S. Park , Dae Sung Yoon , Taeyun Kwon

Electromagnetic properties depend on the composition of materials, i.e. either angstrom scales of molecules or, for metamaterials, subwavelength periodic structures. Each material behaves differently in accordance with the frequency of an…

Self-sustained oscillators are ubiquitous and essential for metrology, communications, time reference, and geolocation. In its most basic form an oscillator consists of a resonator driven on-resonance, through feedback, to create a periodic…

Mesoscale and Nanoscale Physics · Physics 2013-05-21 L. G. Villanueva , E. Kenig , R. B. Karabalin , M. H. Matheny , R. Lifshitz , M. C. Cross , M. L. Roukes

It is an established understanding that the electromagnetic contribution (the plasmon-mediated enhancement of the laser and scattered local electromagnetic fields) is the main actor in Surface Enhanced Raman Scattering (SERS), with the…

Incorporating functional molecules into sensor devices is an emerging field in molecular electronics that aims at exploiting the sensitivity of different molecules to their environment and turning it into an electrical signal. Among the…

The design of artificial nonlinear materials requires control over the internal resonant charge densities and local electric field distributions. We present a MM design with a structurally controllable oscillator strength and local electric…

Two critical characteristics for any MEMS resonator are the quality factor ($Q$) and the temperature coefficient of frequency ($TCF$). The connection between $Q$ and $TCF$ is demonstrated here with a phenomenological anharmonic oscillator…

Mesoscale and Nanoscale Physics · Physics 2024-12-16 S. McHugh

In multi-qubit superconducting systems utilizing flip-chip technology, achieving high accuracy in resonator frequencies is of paramount importance, particularly when multiple resonators share a common Purcell filter with restricted…

Quantum Physics · Physics 2023-12-12 Yuan Li , Tianhui Wang , Jingjing Hu , Dengfeng Li , Shuoming An

For quartz crystal resonators of thickness-shear type, the vibration frequency and mode shapes, which are key features of resonators in circuit applications, reflect the basic material and structural properties of the quartz plate and its…

Materials Science · Physics 2016-11-17 Ji Wang , Wenliang Zhang , Dejin Huang , Tingfeng Ma , Jianke Du , Lijun Yi