Related papers: Silicon on Nothing Mems Electromechanical Resonato…
We report multifunctional operation based on the nonlinear dynamics in a single microelectromechanical system (MEMS) resonator. This Letter focuses on a logic-memory device that uses a closed loop control and a nonlinear MEMS resonator in…
Reconfigurable electromagnetic structures (REMSs), such as reconfigurable reflectarrays (RRAs) or reconfigurable intelligent surfaces (RISs), hold significant potential to improve the spectral efficiency of wireless communication systems…
Here, we demonstrate the fabrication of single-layer MoS2 mechanical resonators. The fabricated resonators have fundamental resonance frequencies in the order of 10 MHz to 30 MHz (depending on their geometry) and their quality factor is…
Surface acoustic wave (SAW) devices are widely used in sensing and biosensing but generally suffer from strong attenuation in liquid environments. Conventional approaches rely on reflectors to reduce these losses, yet these components…
All quantum optomechanics experiments to date operate at cryogenic temperatures, imposing severe technical challenges and fundamental constraints. Here we present a novel design of on-chip mechanical resonators which exhibit fundamental…
Miniaturized two-dimensional scanning mirror based on microelectromechanical systems (MEMS) technology has great potential in automotive industry, consumer electronics, and biomedicine, etc. Due to its high frequency and large angle,…
We fabricate a microscale electromechanical system, in which a suspended superconducting membrane, treated as a mechanical oscillator, capacitively couples to a superconducting microwave resonator. As the microwave driving power increases,…
Micro-mechanical resonators are building blocks of a variety of applications in basic science and applied electronics. This device technology is mainly based on well-established and reproducible silicon-based fabrication processes with…
The analogy between mechanical and electromagnetic resonators has been a celebrated paradigm of science and engineering. Exploration of this analogy in recent years has resulted in several exciting research directions, including cavity…
This paper presents a detailed noise analysis and a noise-based optimization procedure for resonant MEMS structures. A design for high sensitivity of MEMS structures needs to take into account the noise shaping induced by damping phenomena…
We present measurements on nanomechanical resonators machined from Silicon-on-Insulator substrates. The resonators are designed as freely suspended Au/Si beams of lengths on the order of 1 - 4 um and a thickness of 200 nm. The beams are…
This paper shows the effect of scaling silicon accelerometers down from MEMS to NEMS. It models both electronics and Brownian noise sources for both capacitive and resonant devices, and computes the minimum detectable signal attainable.…
Silicon-based micro-electromechanical systems (MEMS) can be fabricated using bulk and surface micromachining technology. A micro mirror designed as an oscillatory MEMS constitutes a prominent example. Typically, in order to minimize energy…
The semicylindrical microresonator with relatively simple excitation with a plane wave is studied. The resonator is formed on the base of the dielectric/metal/dielectric structure, where the wave energy penetrates into resonator through a…
Autonomous oscillators, such as clocks and lasers, produce periodic signals \emph{without} any external frequency reference. In order to sustain stable periodic motions, there needs to be external energy supply as well as nonlinearity built…
We report on experimental demonstration of a new type of nanoelectromechanical resonators based on black phosphorus crystals. Facilitated by a highly efficient dry transfer technique, crystalline black phosphorus flakes are harnessed to…
The development and characterisation of a piezoelectric actuated high-frequency MEMS scanning mirror with on-chip frequency tuning capability is reported. The resonant scanner operates at frequencies in excess of 140 kHz, generating scan…
The oscillatory dynamics of nanoelectromechanical systems (NEMS) is at the heart of many emerging applications in nanotechnology. For common NEMS, such as beams and strings, the oscillatory dynamics is formulated using a dissipationless…
Tuning the frequency of a resonant element is of vital importance in both the macroscopic world, such as when tuning a musical instrument, as well as at the nanoscale. In particular, precisely controlling the resonance frequency of isolated…
Different periodical Frequency Selective Surfaces(FSS) whose unit cell are the Split Ring Resonators (SRR) or related geometries and their corresponding complementary screens were studied. This kind of FSS, sometimes called metasurfaces,…