Related papers: Silicon on Nothing Mems Electromechanical Resonato…
Over the past few years, microelectromechanical system (MEMS) based on-chip resonators have shown significant potential for sensing and high frequency signal processing applications. This is due to their excellent features like small size,…
Microelectromechanical systems (MEMS) resonators serve as frequency selective components in applications ranging from biology to communications. In this paper, the dynamic behavior of an RF MEMS disk resonator is formulated using an…
Microelectromechanical system (MEMS) based on-chip resonators offer great potential for sensing and high frequency signal processing applications due to their exceptional features like small size, large frequency-quality factor product,…
Implementing microelectromechanical system (MEMS) resonators calls for detailed microscopic understanding of the devices, such as energy dissipation channels, spurious modes, and imperfections from microfabrication. Here, we report the…
Very small electromechanical coupling coefficient in micro-electromechanical systems (MEMS) or acoustic resonators is quite of a concern for oscillator performance, specially at mmWave frequencies. This small coefficient is the…
This paper reports the first demonstration of a magnet-free, high performance microelectromechanical system (MEMS) based circulator. An innovative circuit based on the commutation of MEMS resonators with high quality (Q) factor using RF…
The extensive research and development of micromechanical resonators is trying to allow the use of these devices for highly sensitive applications. Microcantilevers are some of the simplest MEMS structure and had been proved to be a good…
Over the past few years, significant growth has been observed in using MEMS based passive components in the RF microelectronics domain, especially in transceiver components. This is due to some excellent properties of the MEMS devices like…
We have designed and characterized micro-electro-mechanical systems (MEMS) for applications at low temperatures. The mechanical resonators were fabricated using a surface micromachining process. The devices consist of a pair of parallel…
Recently the strong demands in wireless communication requires expanding development for the application of RF MEMS (Radio Frequency micro electro mechanical systems) sensing devices such as micro-switches, tunable capacitors because it…
Microelectromechanical system (MEMS) based on-chip resonators offer great potential for high frequency signal processing circuits like reference oscillators and filters. This is due to their exceptional features like small size, large…
CMOS-MEMS resonators seamlessly integrated in advanced integrated circuit (IC) technology have the unique capability to enable unprecedented integration of stable frequency references, acoustic spectral processors, and physical sensors.…
A simple and fast process for micro-electromechanical (MEM) resonators with deep sub-micron transduction gaps in thin SOI is presented in this paper. Thin SOI wafers are important for advanced CMOS technology and thus are evaluated as…
Microelectromechanical systems (MEMS) can offer a competitive alternative for conventional technology in electrical precision measurements. This article summarises recent work in development of MEMS solutions for electrical metrology.…
The rising need for hybrid physical platforms has triggered a renewed interest for the development of agile radio-frequency phononic circuits with complex functionalities. The combination of travelling waves with resonant mechanical…
Micro-mechanical resonators are widely used in modern sensing technology due to their high quality-factor (Q), enabling sensitive detection of various stimuli. However, the performance of these resonators in fluid environments is limited by…
A semi-analytical study of the acoustic radiation losses associated with various transverse vibration modes of a micromechanical (MEMS) annular resonator is presented. The quality factor, Q, of such resonators is of interest in many…
Nowadays microfabrication techniques originating from micro-electronics enable to create mechanical objects of micron-size. The field of Micro-Electro-Mechanical devices (MEMS) is continuously expanding, with an amazingly broad range of…
Resonant electromagnetic actuators have been broadly used as vibration motors for mobile devices given their ability of generating relatively fast, strong, and controllable vibration force at a given resonant frequency. Mechanism of the…
Mechanical nonlinearities dominate the motion of nanoresonators already at relatively small oscillation amplitudes. Although single and coupled two-degrees-of-freedom models have been used to account for experimentally observed nonlinear…