We describe a technique for extracting topographic information using a scanning near-field microwave microscope. By monitoring the shift of the system's resonant frequency, we obtain quantitative topographic images of uniformly conducting metal surfaces. At a frequency of 9.572 GHz, our technique allows for a height discrimination of about 55 nm at a separation of 30 microns. We present topographic images of uneven, conducting samples and compare the height response and sensitivity of the system with theoretical expectations.
@article{arxiv.cond-mat/9802139,
title = {Quantitative topographic imaging using a near-field scanning microwave microscope},
author = {C. P. Vlahacos and D. E. Steinhauer and S. K. Dutta and B. J. Feenstra and Steven M. Anlage and F. C. Wellstood},
journal= {arXiv preprint arXiv:cond-mat/9802139},
year = {2009}
}
Comments
Accepted for publication Applied Physics Letters. To appear tentatively 4/6/98