Nanoscale Mechanical Structures Fabricated from Silicon-on-Insulator Substrates
Abstract
We describe a method with which to fabricate sub-micron mechanical structures from silicon-on-insulator substrates. We believe this is the first reported method for such fabrication, and our technique allows for complex, multilayer electron beam lithography to define metallized layers and structural Si layers on these substrates. The insulating underlayer may be removed by a straightforward wet processing step, leaving suspended single crystal Si mechanical structures. We have fabricated and mechanically tested structures such as beam resonators, tuning-fork resonators, and torsional oscillators, all with smallest dimensions of 0.1-0.2 microns and fundamental resonance frequencies above 10 MHz.
Cite
@article{arxiv.2505.04574,
title = {Nanoscale Mechanical Structures Fabricated from Silicon-on-Insulator Substrates},
author = {Andrew N. Cleland and Michael L. Roukes},
journal= {arXiv preprint arXiv:2505.04574},
year = {2025}
}
Comments
Submitted to Applied Physics Letters in 1996. Rejected by a single referee with the criticism that it was not a sufficient advance over our previous publication (on NEMS fabrication from bulk Si wafers) to warrant acceptance in APL. However, the method described herein has since become the standard fabrication method in the field of NEMS, and used worldwide over the past thirty years