Silicon Waveguides and Ring Resonators at 5.5 {\mu}m
Optics
2015-05-19 v1
Abstract
We demonstrate low loss ridge waveguides and the first ring resonators for the mid-infrared, for wavelengths ranging from 5.4 to 5.6 {\mu}m. Structures were fabricated using electron-beam lithography on the silicon-on-sapphire material system. Waveguide losses of 4.0 +/- 0.7 dB/cm are achieved, as well as Q-values of 3.0 k.
Keywords
Cite
@article{arxiv.1008.2978,
title = {Silicon Waveguides and Ring Resonators at 5.5 {\mu}m},
author = {Alexander Spott and Yang Liu and Tom Baehr-Jones and Rob Ilic and Michael Hochberg},
journal= {arXiv preprint arXiv:1008.2978},
year = {2015}
}
Comments
4 pages, 4 figures, includes supplemental materials