A variability-aware simulation and design workflow for wafer-scale, heterogeneously integrated lithium niobate modulators
Optics
2026-05-28 v1
Abstract
We present a variability-aware simulation framework for heterogeneously integrated lithium niobate traveling-wave modulators. The framework incorporates fabrication-variation data obtained from our dedicated pilot line and enables efficient optimisation of geometric parameters to ensure stable device performance across wafer-scale manufacturing. Using this methodology, we theoretically demonstrate that reliable wafer-scale integration of LN modulators on silicon photonics via micro-transfer printing is feasible and can be systematically engineered.
Cite
@article{arxiv.2605.28765,
title = {A variability-aware simulation and design workflow for wafer-scale, heterogeneously integrated lithium niobate modulators},
author = {Patrick Nenezic and Ewoud Vissers and Arno Moerman and Laurens Bogaert and Simone Atzeni and Xiujun Zheng and Tom Vanackere and Margot Niels and Athina Papadopoulou and Peter De Heyn and Sandeep Saseendran and Maximilien Billet and Bart Kuyken},
journal= {arXiv preprint arXiv:2605.28765},
year = {2026}
}